4:00 PM - 6:00 PM
○Daisuke Yamane1, Toshifumi Konishi2, Takaaki Matsushima2, Hiroyuki Ito1, Noboru Ishihara1, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Inst. of Tech.1, NTT-AT2, The Univ. of Tokyo3)
Poster presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
Wed. Mar 19, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
4:00 PM - 6:00 PM
○Daisuke Yamane1, Toshifumi Konishi2, Takaaki Matsushima2, Hiroyuki Ito1, Noboru Ishihara1, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Inst. of Tech.1, NTT-AT2, The Univ. of Tokyo3)
4:00 PM - 6:00 PM
○Takaaki Matsushima1, Toshifumi Konishi1, Daisuke Yamane2, Hiroyuki Ito2, Noboru Ishihara2, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu2 (NTT-AT1, Tokyo Inst. of Tech.2, The Univ. of Tokyo3)
4:00 PM - 6:00 PM
○Ken Kagaya1, Toshifumi Konishi2, Daisuke Yamane1, Takaaki Matsushima2, Hiroyuki Ito1, Noboru Ishihara1, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Inst. of Tech.1, NTT-AT2, The Univ. of Tokyo3)
4:00 PM - 6:00 PM
○Toshifumi Konishi1, Ken Kagaya2, Daisuke Yamane2, Takaaki Matsushima1, Hiroyuki Ito2, Noboru Ishihara2, Kazuya Masu2, Katsuyuki Machida1,2, Hiroshi Toshiyoshi3 (NTT-AT1, Tokyo Tech.2, Univ. of Tokyo3)
4:00 PM - 6:00 PM
○Hiroyuki Ito1, Toshifumi Konishi2, Takaaki Matsushima2, Daisuke Yamane1, Noboru Ishihara1, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Tech.1, NTT-AT2)
4:00 PM - 6:00 PM
Ryoto Sato1, Shinya Kumagai1, Masaru Hori2, ○Minoru Sasaki1 (Toyota Technol. Inst.1, Nagoya Univ.2)
4:00 PM - 6:00 PM
○(P)Jonghyeon Jeong1, Tatsuya Yamazaki1, Shinya Kumagai1,3, Ichiro Yamashita2,3, Yukiharu Uraoka2,3, Minoru Sasaki1,3 (Toyota Technological Inst.1, NAIST2, CREST/JST3)
4:00 PM - 6:00 PM
○Shingo Moriue1, Junichi Inoue1, Syogo Kajimura1, Kensuke Kanda1, Takayuki Fujita1, Kazusuke Maenaka1 (Univ.of Hyogo1)
4:00 PM - 6:00 PM
○Ryo Sano1, Junichi Inoue1, Kensuke Kanda1, Takayuki Fujita1, Kazusuke Maenaka1 (University of Hyogo1)
4:00 PM - 6:00 PM
○(D)Shun Na1, Kentaro Iwami1, Norihiro Umeda1 (Tokyo Univ. of Agriculture and Technology1)
4:00 PM - 6:00 PM
○Tatsuya Meguro1, Daiki Chida1, Akito Hara1 (Tohoku Gakuin Univ.1)
4:00 PM - 6:00 PM
Keisuke Goto1, Kuninori Kitahara2, ○Akito Hara1 (Tohoku Gakuin Univ.1, Shimane Univ.2)
4:00 PM - 6:00 PM
○Shinya Kamo1, Risa Kurosu1, Tadashi Sato2, Akito Hara1 (Tohoku Gakuin Univ.1, RNBS Hiroshima Univ.2)
4:00 PM - 6:00 PM
○Wataru Mizubayashi1, Hiroshi Onoda2, Yoshiki Nakashima2, Yuki Ishikawa1, Takashi Matsukawa1, Kazuhiko Endo1, Yongxun Liu1, Shinichi O’uchi1, Junichi Tsukada1, Hiromi Yamauchi1, Shinji Migita1, Yukinori Morita1, Hiroyuki Ota1, Meishoku Masahara1 (AIST1, Nissin Ion Equipment2)
4:00 PM - 6:00 PM
○Yoshihiko Moriyama1,2, Yuuichi Kamimuta1, Yoshiki Kamata1, Keiji Ikeda1, Shotaro Takeuchi2, Yoshiaki Nakamura2, Akira Sakai2, Tsutomu Tezuka1 (GNC-AIST1, Osaka Univ.2)
4:00 PM - 6:00 PM
○Ryo Yoshihara1, Masaaki Motoki1, Kuniyuki Kakushima2, Yoshinori Kataoka2, Akira Nishiyama2, Nobuyuki Sugii2, Hitoshi Wakabayashi2, Kazuo Tsutsui2, Kenji Natori1, Hiroshi Iwai1 (Tokyo Tech. FRC1, Tokyo Tech. IGSSE2)
4:00 PM - 6:00 PM
○Yasuo Shimizu1, Hisashi Takamizawa1, Koji Inoue1, Fumiko Yano1,2, Yasuyoshi Nagai1, Luca Lamagna3, Giovanni Mazzeo3,4, Michele Perego3, Enrico Prati3 (IMR Tohoku Univ.1, Tokyo City Univ.2, Laboratorio MDM, CNR-IMM3, Universita di Milano Bicocca4)
4:00 PM - 6:00 PM
○(DC)Shohei Hayashi1,2, Seiji Morisaki1, Takahiro Kamikura1, Shogo Yamamoto1, Taichi Nakatani1, Seiichiro Higashi1 (Hiroshima Univ.1, JSPS Research Fellow DC2)
4:00 PM - 6:00 PM
○Takatoshi Sugiyama1, Masao Kamiko2, Kentaro Kyuno1 (Shibaura Institute of Technology1, Institute of Industrial Science, University of Tokyo2)
4:00 PM - 6:00 PM
○Tatsuaki Hirata1, Shin-Ichiro Kuroki1, Masayuki Yamano1, Tadashi Sato1, Kouji Kotani2, Takamato Kikkawa1 (Hiroshima Univ. (RNBS)1, Tohoku Univ.2)
4:00 PM - 6:00 PM
○Masashi Kurosawa1,2, Hiroshi Ikenoue3, Yoshiki Kamata4, Noriyuki Taoka1, Osamu Nakatsuka1, Tsutomu Tezuka4, Shigeaki Zaima1 (Nagoya Univ.1, JSPS2, Kyushu Univ.3, AIST/GNC4)
4:00 PM - 6:00 PM
○Naoya Kawamoto1, Kazuyuki Tadatomo1, Akira Heya2, Naoto Matsuo2 (Yamaguchi Univ.1, Univ. of Hyogo2)
4:00 PM - 6:00 PM
○Masaaki Motoki1, Kuniyuki Kakushima2, Yoshinori Kataoka2, Akira Nishiyama2, Nobuyuki Sugii2, Hitoshi Wakabayashi2, Kazuo Tsutsui2, Kenji Natori1, Hiroshi Iwai1 (Tokyo Tech. FRC1, Tokyo Tech. IGSSE2)
4:00 PM - 6:00 PM
○Masahiro Koike1, Yuuichi Kamimuta1, Yoshihiko Moriyama1, Yoshiki Kamata1, Etsuo Kurosawa1, Tsutomu Tezuka1 (GNC, AIST1)
4:00 PM - 6:00 PM
○Masahiro Koike1, Yuuichi Kamimuta1, Etsuo Kurosawa1, Tsutomu Tezuka1 (GNC, AIST1)
4:00 PM - 6:00 PM
○(D)Tuokedaerhan Kamale1, Shuhei Hosoda1, Kuniyuki Kakushima2, Yoshinori Kataoka2, Akira Nishiyama2, Nobuyuki Sugii2, Hitoshi Wakabayashi1, Kazuo Tsutsui2, Kenji Natori1, Hiroshi Iwai1 (Tokyo Tech. FRC1, Tokyo Tech. IGSSE2)
4:00 PM - 6:00 PM
○Shuhei Hosoda1, Tuokedaerhan Kamale1, Kuniyuki Kakushima2, Yoshinori Kataoka2, Akira Nishiyama2, Nobuyuki Sugii2, Hitoshi Wakabayashi2, Kazuo Tsutsui2, Kenji Natori1, Hiroshi Iwai1 (Tokyo Tech.FRC1, Tokyo Tech.IGSSE2)
4:00 PM - 6:00 PM
○Hiroaki Imamura1, Kuniyuki Kakushima2, Yoshinori Kataoka2, Akira Nishiyama2, Nobuyuki Sugii2, Hitoshi Wakabayashi2, Kazuo Tsutsui2, Kenji Natori1, Hiroshi Iwai1 (Tokyo Tech. FRC1, Tokyo Tech. IGSSE2)
4:00 PM - 6:00 PM
○Hiroki Hasegawa1, Yan Wu1, Jinhan Song1, Kuniyuki Kakushima2, Yoshinori Kataoka2, Akira Nishiyama2, Nobuyuki Sugii2, Hitoshi Wakabayasshi2, Kazuo Tsutsui2, Kenji Natori1, Hiroshi Iwai1 (Tokyo Tech.FRC1, Tokyo Tech.IGSSE2)
4:00 PM - 6:00 PM
○Mitsuhiro Watanabe1, Yoshiki Nakamura1, Eiichi Kondoh1 (Univ. Yamanashi1)
4:00 PM - 6:00 PM
○Koji Takemura1, Masashi Morimoto1, Syota Nishida1, Jenbo Liang1, Naoteru Shigekawa1 (Osaka City Univ.1)
4:00 PM - 6:00 PM
○Ryohei Sano1, Syohei Koide1, Yudai Fukushi1, Tsubasa Sasaki1, Hiroshi Mogi1, Yasushiro Nishioka1 (CST1)