[LD-11] Effects of Grown-in Hydrogen on Electrical Properties of Czochralski Silicon Crystals

Akito Hara、Masaaki Koizuka、Hiroshi Yamada-Kaneta、Haruhisa Mori (1.Fujitsu Limited)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-12] Oxygen Precipitate Density Control in CZ-Si Wafers by Hydrogen Annealing Process

K. Izunome、H. Shirai、K. Kashima、J. Yoshikawa、A. Hojo (1.Toshiba Ceramics R&D Center、2.Toshiba Ceramics Silicon Division)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-13] Element Specific Diagnosis Using μ-PCD

L. Koster、P. Blochl、L. Fabry (1.Wacker-Chemitronic GmbH)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-14] Photovoltaic Investigations of Interband Transitions in SiGe/Si Multiple Quantum Wells

Jian-bao Wang、Fang Lu、Heng-hui Sun Da-wei Gong、Xun Wang (1.Fudan T. D. Lee Physics Laboratory, Fudan University、2.Surface Physics Laboratory, Fudan University)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-15] A Novel Trench Capping Process Using CMP with Endpoint Detection

Hiroshi Inokawa、Masayasu Miyake、Satoshi Nakayama、Toshio Kobayashi (1.NTT LSI Laboratories)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-16] High Speed Fully Depleted CMOS/SIMOX Gate Array

Xing Zhang、Liqiong Wei、Yingxue Li、Yangyuan Wang (1.Institute of microelectronics, Peking University)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-17] Low-Temperature Drain Current Characteristics in Sub-10-min-Thick SOI nMOSFET's on SIMOX Substrates

Yasuhisa Omura、Masao Nagase (1.NTT LSI Laboratories)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-18] ON-Current Stability of Poly-Si Thin Film Transistor with Si-rich Oxide as Intermetal Dielectric Film after Negative Bias Temperature Stress

Gug-Seon Choi、Jin-Ho Choi、Yoon-Jong Lee、Jong-Wan Nam、Sook-Rak Ma、Kyung-Sik Chang、Jong-Sub Yoon、Hee-Koo Yoon (1.Semiconductor R&D Lab. 1, Hyundai Electronics Industries Co., Ltd.)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-19] A Novel Lateral IGBT Structure with Improving the Dynamic Latch-up Performances

Hitoshi Sumida、Atsuo Hirabayashi (1.Advanced Device Technology Laboratory, Fuji Electric R&D, Ltd.)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-20] A Novel Fabrication Method for Short Channel MOSFET's Using Self-Aligned Ultrashallow Junction Formation by Selective Si1-xGex CVD

Kinya GOTO、Junichi MUROTA、Fumitaka HONMA、Takashi MATSUURA、Yasuji SAWADA (1.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード