[A-5-02] Control of HfO₂ Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing

〇Toshiyuki Tabata¹、Pablo Acosta Alba²、Jérôme Richy²、Marianne Coig²、Pierre-Edouard Raynal¹、Fabien Rozé¹、Sebastien Kerdilès² (1.Laser Systems & Solutions of Europe (LASSE)、2.Univ. Grenoble Alpes, CEA-LETI)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 14:07 〜 14:14 |PDF ダウンロード

[A-5-03] Antiferroelectric properties of ALD ZrO₂ ultra-thin films: correlation with the crystalline structure

〇Xuan Luo¹、Kasidit Toprasertpong¹、Mitsuru Takenaka¹、Shinichi Takagi¹ (1.Univ. of Tokyo)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 14:14 〜 14:21 |PDF ダウンロード

[A-5-04] Carrier Transport properties of Ferroelectric Hf_0.5Zr_0.5O₂ Thin Films in Poling Treatment

〇Yukinori Morita¹、Hiroyuki Ota¹、Shinji Migita¹ (1.AIST)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 14:21 〜 14:28 |PDF ダウンロード

[A-5-05] Investigation and Design of LK-Type Ferroelectric FET for Ultralow-Voltage NVM Applications

〇Bo-Kai Huang¹、Wei-Xiang You¹、Pin Su¹ (1.National Yang Ming Chiao Tung Univ.)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 14:28 〜 14:35 |PDF ダウンロード

[A-6-01 (Invited)] SOI CMOS and SiGe BiCMOS Technologies for RF and mmW Applications

〇Pascal Chevalier¹、Sylvie Gachon²、Frédéric Gianesello¹、Andrea Pallotta³、Nicolas Planes¹、Patrick Scheer¹、Benjamin Dormieu¹、Andreia Cathelin¹、Patrice Garcia¹、Nuccio Villa⁴、Guillaume Bertrand¹、Edoardo Brezza¹、Elodie Canderle¹、Didier Céli¹、Philippe Cathelin¹、Tulio Chaves de Albuquerque¹、Sébastien Crémer¹、Nicolas Derrier¹、Siddhartha Dhar¹、Houssein El Dirani¹、Cédric Durand¹、Alexis Gauthier¹、Nicolas Guitard¹、Alain Fleury¹、Franck Julien⁵、Daniel Gloria¹、Eric Granger¹、Frédéric Paillardet¹、Victor Milon¹、Stéphane Monfray¹、Frédéric Monsieur¹、Yannick Mourier¹、Isabelle Sicard¹、Jacky Uginet¹、Nathalie Vulliet¹ (1.STMicroelectronics, Crolles、2.STMicroelectronics, Grenoble、3.STMicroelectronics, Cornaredo、4.STMicroelectronics, Agrate Brianza、5.STMicroelectronics, Rousset)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 15:45 〜 16:15 |PDF ダウンロード

[A-6-02] Potential benefits of S/D HDD activation by melt laser annealing in 3D-integrated top-tier FDSOI FETs

Anne Vandooren¹、〇Toshiyuki Tabata²、Pierre Eyben¹、Erik Roseel¹、Andriy Hikavyy¹、Karim Huet²、Fulvio Mazzamuto²、Eugenio Dentoni Litta¹、Naoto Horiguchi¹ (1.imec、2.Laser Systems & Solutions of Europe (LASSE))

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 16:15 〜 16:22 |PDF ダウンロード

[A-6-03] Impact of the buried oxide thickness in UV laser heated 3D stacks

Pierre Morin¹、〇Toshiyuki Tabata²、Fabien Rozé ²、Mohamed Saib ¹、Hilde Thielens ¹、Louis Thuries ²、Karim Huet²、Fulvio Mazzamuto ² (1.imec、2.Laser Systems & Solutions of Europe (LASSE))

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 16:22 〜 16:29 |PDF ダウンロード

[A-6-04] Novel Optical Pixel Structure for High Sensitivity in CMOS Image Sensor with 0.7μm Pixels

Jonghoon Park¹、〇Taesung Lee¹、Yunji Jung¹、Junsung Park¹、Chunho Park¹、Taehan Kim¹、Yunki Lee¹、Bumsuk Kim¹、Jungchak Ahn¹ (1.Samsung Electronic Co., Ltd.)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 16:29 〜 16:36 |PDF ダウンロード

[A-6-05] CMOS Image Sensor with Double Patterned 2x1 On-Chip Lens Phase Detection Auto Focus

Dongmin Keum¹、〇Yeaju Jang¹、Kwang Hee Lee¹、Junsung Park¹、Taesung Lee¹、Yunki Lee¹、Bumsuk Kim¹、Jungchak Ahn¹ (1.Samsung Electronics Co., Ltd.)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 16:36 〜 16:43 |PDF ダウンロード

[A-6-06] A Robust Single Device MOSFET Series Resistance Extraction Method Considering Horizontal-Field-Dependent Mobility

〇Kiyoshi Takeuchi¹、Tomoko Mizutani¹、Takuya Saraya¹、Masaharu Kobayashi¹、Toshiro Hiramoto¹ (1.Univ. of Tokyo)

2021 International Conference on Solid State Devices and Materials |2021年9月8日(水) 16:43 〜 16:50 |PDF ダウンロード