[J-4-05] Lateral growth of single crystal strip in Si film above bottom gate for high mobility thin-film transistors

〇Wenchang Yeh¹, Kaisei Ohtoge¹ (1.Shimane Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 11:36 AM - 11:43 AM |PDF Download

[J-4-06] Characteristics of Millisecond Solid Phase Crystallized Silicon Films Formed by Micro-Thermal-Plasma-Jet and Their Application to Bottom-Gate Thin Film Transistor

〇Hoa ThiKhanh Nguyen¹, Hiroaki Hanafusa¹, Ryuji Kawakita¹, Kazuki Segawa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 11:43 AM - 11:50 AM |PDF Download

[J-4-07] Effects of Crystallization Conditions on the Electrical Characteristics of P-type Ge TFTs Formed by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation

〇Takuma SATO¹, Hiroaki HANAFUSA¹, Seiichiro HIGASHI¹ (1.Hiroshima Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 11:50 AM - 11:57 AM |PDF Download

[J-4-08] Sn Doping Effects on Polycrystalline Germanium Thin-Film Transistors on Glass

〇Kenta Moto^1,2, Keisuke Yamamoto¹, Toshifumi Imajo^2,3, Takashi Suemasu³, Hiroshi Nakashima¹, Kaoru Toko³ (1.Kyushu Univ., 2.JSPS Research Fellow, 3.Univ. of Tsukuba)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 11:57 AM - 12:04 PM |PDF Download

[J-5-01 (Invited)] Complementary Thin-Film Transistor Technology Based on Oxide Semiconductors

〇I-Chun Cheng¹, Shu-Ming Hsu¹, Dung-Yue Su¹, Feng-Yu Tsai¹, Jian-Zhang Chen¹ (1.National Taiwan Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:00 PM - 2:30 PM |PDF Download

[J-5-02] Operando Hard X-ray Photoelectron Spectroscopy Study of Buried Interface Chemistry of Au/In₂O₃/Al₂O₃/p⁺-Si Stacks under Applied Bias

〇Ibrahima Gueye¹, Riku Kobayashi^1,2, Shigenori Ueda¹, Toshihide Nabatame³, Kazuhito Tsukagoshi³, Atsushi Ogura^2,4, Takahiro Nagata^1,2,3 (1.National Institute for Materials Science (NIMS), Research Center for Functional Materials, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, 2.Graduate School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 214-8571, 3.International Center for Materials Nanoarchitectonics (WPI-MANA), NIMS, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, 4.Meiji Renewable Energy Laboratory, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 214-8571)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:30 PM - 2:37 PM |PDF Download

[J-5-03] High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction

〇Yusuke Hayashi¹, Nozomi Yamamoto¹, Yudai Nakanishi¹, Takeaki Hamachi¹, Tetsuya Tohei¹, Kazushi Sumitani², Yasuhiko Imai², Shigeru Kimura², Kanako Shojiki³, Hideto Miyake³, Akira Sakai¹ (1.Osaka Univ., 2.JASRI, 3.Mie Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:37 PM - 2:44 PM |PDF Download

[J-5-04] Study on Negative-Bias Photodegradation Mechanism in IGZO FET with First -Principles Calculation

〇Tomonori Nakayama¹, Masahiro Takahashi¹, Hitoshi Kunitake¹, Kuo-Chang Huang², Hiroshi Yoshida², Miller Liao³, Shou-Zen Chang², Shunpei Yamazaki¹ (1.Semiconductor Energy Laboratory Corp., Ltd, 2.Powerchip Semiconductor Manufacturing Corp., 3.National Taiwan Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:44 PM - 2:51 PM |PDF Download

[J-5-05] [No-Show]Photoconductive laser spectroscopy as a method for direct observation of negative bias illumination stress (NBIS) induced modulation of defects in zinc-tin-oxide TFT

〇Soumen Dhara¹, Stephen A Lynch² (1.Sri Sri Univ., 2.Univ. of Cardiff)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:51 PM - 2:58 PM

[J-5-06] Stability of Crystalline IGZO Owing to Minute Crystal Region

〇Tomonori Nakayama¹, Masahiro Takahashi¹, Hitoshi Kunitake¹, Shunpei Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:58 PM - 3:05 PM |PDF Download