[A-5-02] Control of HfO₂ Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing

〇Toshiyuki Tabata¹, Pablo Acosta Alba², Jérôme Richy², Marianne Coig², Pierre-Edouard Raynal¹, Fabien Rozé¹, Sebastien Kerdilès² (1.Laser Systems & Solutions of Europe (LASSE), 2.Univ. Grenoble Alpes, CEA-LETI)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:07 PM - 2:14 PM |PDF Download

[A-5-03] Antiferroelectric properties of ALD ZrO₂ ultra-thin films: correlation with the crystalline structure

〇Xuan Luo¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:14 PM - 2:21 PM |PDF Download

[A-5-04] Carrier Transport properties of Ferroelectric Hf_0.5Zr_0.5O₂ Thin Films in Poling Treatment

〇Yukinori Morita¹, Hiroyuki Ota¹, Shinji Migita¹ (1.AIST)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:21 PM - 2:28 PM |PDF Download

[A-5-05] Investigation and Design of LK-Type Ferroelectric FET for Ultralow-Voltage NVM Applications

〇Bo-Kai Huang¹, Wei-Xiang You¹, Pin Su¹ (1.National Yang Ming Chiao Tung Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:28 PM - 2:35 PM |PDF Download

[A-6-01 (Invited)] SOI CMOS and SiGe BiCMOS Technologies for RF and mmW Applications

〇Pascal Chevalier¹, Sylvie Gachon², Frédéric Gianesello¹, Andrea Pallotta³, Nicolas Planes¹, Patrick Scheer¹, Benjamin Dormieu¹, Andreia Cathelin¹, Patrice Garcia¹, Nuccio Villa⁴, Guillaume Bertrand¹, Edoardo Brezza¹, Elodie Canderle¹, Didier Céli¹, Philippe Cathelin¹, Tulio Chaves de Albuquerque¹, Sébastien Crémer¹, Nicolas Derrier¹, Siddhartha Dhar¹, Houssein El Dirani¹, Cédric Durand¹, Alexis Gauthier¹, Nicolas Guitard¹, Alain Fleury¹, Franck Julien⁵, Daniel Gloria¹, Eric Granger¹, Frédéric Paillardet¹, Victor Milon¹, Stéphane Monfray¹, Frédéric Monsieur¹, Yannick Mourier¹, Isabelle Sicard¹, Jacky Uginet¹, Nathalie Vulliet¹ (1.STMicroelectronics, Crolles, 2.STMicroelectronics, Grenoble, 3.STMicroelectronics, Cornaredo, 4.STMicroelectronics, Agrate Brianza, 5.STMicroelectronics, Rousset)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 3:45 PM - 4:15 PM |PDF Download

[A-6-02] Potential benefits of S/D HDD activation by melt laser annealing in 3D-integrated top-tier FDSOI FETs

Anne Vandooren¹, 〇Toshiyuki Tabata², Pierre Eyben¹, Erik Roseel¹, Andriy Hikavyy¹, Karim Huet², Fulvio Mazzamuto², Eugenio Dentoni Litta¹, Naoto Horiguchi¹ (1.imec, 2.Laser Systems & Solutions of Europe (LASSE))

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:15 PM - 4:22 PM |PDF Download

[A-6-03] Impact of the buried oxide thickness in UV laser heated 3D stacks

Pierre Morin¹, 〇Toshiyuki Tabata², Fabien Rozé ², Mohamed Saib ¹, Hilde Thielens ¹, Louis Thuries ², Karim Huet², Fulvio Mazzamuto ² (1.imec, 2.Laser Systems & Solutions of Europe (LASSE))

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:22 PM - 4:29 PM |PDF Download

[A-6-04] Novel Optical Pixel Structure for High Sensitivity in CMOS Image Sensor with 0.7μm Pixels

Jonghoon Park¹, 〇Taesung Lee¹, Yunji Jung¹, Junsung Park¹, Chunho Park¹, Taehan Kim¹, Yunki Lee¹, Bumsuk Kim¹, Jungchak Ahn¹ (1.Samsung Electronic Co., Ltd.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:29 PM - 4:36 PM |PDF Download

[A-6-05] CMOS Image Sensor with Double Patterned 2x1 On-Chip Lens Phase Detection Auto Focus

Dongmin Keum¹, 〇Yeaju Jang¹, Kwang Hee Lee¹, Junsung Park¹, Taesung Lee¹, Yunki Lee¹, Bumsuk Kim¹, Jungchak Ahn¹ (1.Samsung Electronics Co., Ltd.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:36 PM - 4:43 PM |PDF Download

[A-6-06] A Robust Single Device MOSFET Series Resistance Extraction Method Considering Horizontal-Field-Dependent Mobility

〇Kiyoshi Takeuchi¹, Tomoko Mizutani¹, Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.Univ. of Tokyo)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:43 PM - 4:50 PM |PDF Download