[K-5-06] Growth of single-grain crystal on SiO₂ sandwiched Au films by micron chevron-shaped laser beam scanning

〇Anh Hoang Pham¹, Wenchang Yeh¹, Shigekazu Morito¹, Takuya Ohba¹ (1.Shimane Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:35 PM - 2:42 PM |PDF Download

[K-5-07] Sputtering gas pressure dependence on the LaB_xN_y insulator formation

〇Eun-Ki Hong¹, Shun-ichiro Ohmi¹ (1.Tokyo Inst. of Tech.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 2:42 PM - 2:49 PM |PDF Download

[K-6-01 (Invited)] Si and SiGe Epitaxial Growth in view of Nanosheet CMOS Devices and 3D Sequential Integration

〇Roger Loo¹, Andriy Hikavyy¹, Clement Porret¹, Erik Rosseel¹, Gianluca Rengo^1,2,3, Rami Khazaka⁴, Qi Xie⁴, André Vantomme², Robert Langer¹ (1.imec, 2.Quantum Solid State Physics, KU Leuven, 3.Fonds Wetenschappelijk Onderzoek (FWO) - Vlaanderen, 4.ASM Belgium NV)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 3:45 PM - 4:15 PM |PDF Download

[K-6-02] Solid-phase crystallization of ultra-thin amorphous Ge layers on insulators

〇Ryo Oishi¹, Masashi Kurosawa¹, Osamu Nakatsuka^1,2 (1.Grad. Sch. of Eng., Nagoya Univ., 2.IMaSS, Nagoya Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:15 PM - 4:22 PM |PDF Download

[K-6-03] Ni-Induced Lateral Crystallization of Densified Amorphous Ge Layer

〇Takamitsu Ishiyama¹, Toshifumi Imajo¹, Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of Tsukuba)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:22 PM - 4:29 PM |PDF Download

[K-6-04] First Demonstration of Photoresponsivity in a Polycrystalline Ge-based Thin Film

〇Takuto Mizoguchi¹, Toshifumi Imajo¹, Kenta Moto², Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of Tsukuba, 2.Kyushu Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:29 PM - 4:36 PM |PDF Download

[K-6-05] Effect of Sn doping to Solid-Phase Crystallization of Si thin film on Insulator

〇Tomohiro Kosugi¹, Kota Okamoto¹, Taizoh Sadoh¹ (1.Kyushu Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:36 PM - 4:43 PM |PDF Download

[K-6-06] High Carrier Mobility of Sn-Doped Ge Ultrathin Films on Insulator by Capping-Enhanced Solid-Phase Crystallization

〇Ryutaro Hara¹, Masanori Chiyozono¹, Taizoh Sadoh¹ (1.Kyushu Univ. )

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:43 PM - 4:50 PM |PDF Download

[K-6-07] SiSn Mediated Formation of Polycrystalline SiGeSn

〇Yosuke Shimura^1,2, Masaki Okado¹, Hirokazu Tatsuoka¹ (1.Shizuoka Univ., 2.Research Inst. of Electronics)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:50 PM - 4:57 PM |PDF Download

[K-6-08] High Ge-Content SiGe Films Epitaxially Grown by Annealing Al-Ge Alloyed Pastes on Si Substrate

〇Keisuke Fukuda¹, Satoru Miyamoto¹, Masahiro Nakahara ², Shota Suzuki², Marwan Dhamrin^2,4, Kensaku Maeda³, Kozo Fujiwara³, Noritaka Usami¹ (1.Nagoya Univ., 2.Toyo Alminium Corp., 3.Tohoku Univ., 4.Osaka Univ.)

2021 International Conference on Solid State Devices and Materials |Wed. Sep 8, 2021 4:57 PM - 5:04 PM |PDF Download