8:45 AM - 9:00 AM
〇Masaya Hotta1, Hiroshi Nishizato1, Haruki Toonoe2, Ikunari Shiba2, Takuya Maeda3, Satoshi Fujii3 (1.HORIBA STEC, 2.Yokogawa S. S., 3.N.I.T, Okinawa Coll.)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Sep 10, 2020 8:45 AM - 11:30 AM Z10
Hitoshi Habuka(Yokohama Natl. Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
8:45 AM - 9:00 AM
〇Masaya Hotta1, Hiroshi Nishizato1, Haruki Toonoe2, Ikunari Shiba2, Takuya Maeda3, Satoshi Fujii3 (1.HORIBA STEC, 2.Yokogawa S. S., 3.N.I.T, Okinawa Coll.)
9:00 AM - 9:15 AM
〇Shuichi Noda1, Fumito Imura1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-kogyo)
9:15 AM - 9:30 AM
〇Noriko Miura1, Naoki Hashimoto1,2, Yoshitaka Kitamura1,2, Fumito Imura3, Kazushige Sato1, Kazuhiro Koga1, Yuuki Ishida1,3, Toshiyuki Oodaira3, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.MINIMAL, 2.FUJI IMVAC INC., 3.AIST)
9:30 AM - 9:45 AM
〇Kazuhiro Koga1, Masashi Kase2, Kazushige Sato1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
9:45 AM - 10:00 AM
〇Mana Otani1, Atsuhiro Motomiya1, Toshinori Takahashi1, Mitsuko Muroi1, Hitoshi Habuka1, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)
10:15 AM - 10:30 AM
〇Fumito Imura1, Michihiro Inoue1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
10:30 AM - 10:45 AM
〇Fumito Imura1, Michihiro Inoue1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
10:45 AM - 11:00 AM
〇Shuhei Nakamichi1, Hiroyuki Tanaka2, Fumito Imura2, Shuichi Noda2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.Minimal Fab, 2.AIST)
11:00 AM - 11:15 AM
〇Kazumasa Nemoto1, Takashi Yajima1, Kazuhiro koga2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
11:15 AM - 11:30 AM
〇Hideyuki Watanabe1, Kazumasa Nemoto1, Takashi Yajima1, Shuichi Noda1, Fumito Imura1, Mickael Lozach1, Hitoshi Umezawa1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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