The Japan Society of Applied Physics

734 results (331 - 340)

[PS-1-06] Influence of Low Thermal Budget Plasma Oxidation and Millisecond Laser Anneal on Gate Stack Reliability in view of 3D Sequential Integration

C. -M. V. Lu1,2, C. Fenouillet-Béranger1, R. Gassilloud1, H. Graoui3, D. Larmagnac4, S. Sharma3, X. Garros1, C. Leroux1, A. Toffoli1, G. Romano1,2, R. Kies1, N. Rambal1, M. -P. Samson2, B. Previtali1, C. Guedj1, N. Bernier1, S. Kerdiles1, L. Brunet1, P. Batude1, T. Skotnicki2, M. Vinet1 (1.CEA-LETI(France), 2.STMicroelectronics(France), 3.Applied Materials Inc.(USA), 4.Applied Materials France(France))

2016 International Conference on Solid State Devices and Materials |Wed. Sep 28, 2016 11:15 AM - 11:18 AM |PDF Download

[PS-1-07] Integration of Low Temperature 480℃ SiOCN as Offset Spacer in view of 3D Sequential Integration

C. -M. V. Lu1,2, C. Fenouillet-Béranger1, C. Bout1, A. Roule1, V. Beugin1, J. Fort3, C. Arvet2, N. Posseme1, V. Loup1, P. Besson2, M. -P. Samson2, B. Previtali1, C. Tabone1, A. Michallet2, N. Rochat1, D. Benoit2, F. Pierre1, L. Brunet1, P. Batude1, T. Skotnicki2, M. Vinet1 (1.CEA-LETI(France), 2.STMicroelectronics(France), 3.Applied Materials France(France))

2016 International Conference on Solid State Devices and Materials |Wed. Sep 28, 2016 11:18 AM - 11:21 AM |PDF Download

734 results (331 - 340)