[E-7-03] Piezoresistive Strain Sensors Based On Gold Nanoparticle Deposits On PDMS Substrates For Highly Sensitive Human Pulse Sensing

〇Wei-Rong Yang¹, Yu-Shun Su¹, Jenn-Ming Song¹, Watson Kuo¹, Shien-Der Tzeng², Kiyokazu Yasuda³ (1. National Chung Hsing University (Taiwan), 2. National Dong Hwa University (Taiwan), 3. Osaka University (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 09:45 〜 10:00 |PDF ダウンロード

[E-7-04 (Late News)] Study on Microfluidic analysis system with molecular sensing based on Surface-enhanced Raman Scattering

〇Akinobu Yamaguchi¹, Taku Tanaka¹, Shunya Saegusa¹, Masayuki Naya^2,1, Takao Fukuoka³, Sho Amano¹, Yuichi Utsumi¹ (1. Univ. of Hyogo (Japan), 2. Keio Univ. (Japan), 3. Kyoto Univ. (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 10:00 〜 10:15 |PDF ダウンロード

[E-7-05 (Late News)] Assessment for Moisture Resistance Reliability of Graphene-Capped Copper Structures by Spectroscopic Ellipsometry

〇Shun Nakajima¹, Yoko Wasai², Kenji Kawahara³, Nataliya Nabatova-Gabain², Hiroki Ago³, Hiroyuki Akinaga⁴, Kazuyoshi Ueno¹ (1. Shibaura Inst. Tech. (Japan), 2. Horiba Techno Service Co. Ltd. (Japan), 3. Kyushu Univ. (Japan), 4. Nat. Inst. Adv. Indus. Sci. Tech. (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 10:15 〜 10:30 |PDF ダウンロード

[E-7-06 (Late News)] Control of Surface Oxidation and Stress by Additives in Ni Electrodeposition

〇Takeyasu Saito¹, Kohei Yamada¹, Ryosuke Komoda¹, Naoki Okamoto¹ (1. Osaka Metropolitan University (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 10:30 〜 10:45 |PDF ダウンロード

[F-1-01] Fabrication of Thin Ferroelectric Hf_0.5Zr_0.5O₂ Film by Millisecond Flash Lamp Annealing

Yasuo Nara¹, Yuto Ota¹, 〇Hideaki Tanimura², Hikaru Kawarazaki², Shin'ichi Kato² (1. Univ. of Hyogo (Japan), 2. SCREEN Semiconductor Solutions Co., Ltd. (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月27日(火) 11:30 〜 11:45 |PDF ダウンロード

[F-1-02] Formation of ferroelectric ZrO₂ film in ultra-thin region by sputtering method

〇Shigehisa Shibayama¹, Jotaro Nagano¹, Mitsuo Sakashita¹, Osamu Nakatsuka^1,2 (1. Nagoya Univ. (Japan), 2. IMaSS, Nagoya Univ. (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月27日(火) 11:45 〜 12:00 |PDF ダウンロード

[F-1-03] Conflicting Effect of Oxygen Vacancy in the Bulk and at the Interface on Endurance of Hf_0.5Zr_0.5O₂ Ferroelectric Thin Film

〇Danyang Chen¹, Tianning Cui¹, Shuman Zhong¹, Liying Wu¹, Jingquan Liu¹, Mengwei Si¹, Xiuyan Li¹ (1. Shanghai Jiao Tong Univ. (China))

2022 International Conference on Solid State Devices and Materials |2022年9月27日(火) 12:00 〜 12:15 |PDF ダウンロード

[F-1-04] Demonstration of Ultra-thin Sub-10 nm Indium Oxide (In₂O₃) Field-Effect-Transistors (FETs) by Sputtering Deposition with Annealing-Free Toward BEOL Memory Applications

Zhao-Feng LOU¹, Chun-Yu Liao¹, Kuo-Yu Hsiang^1,2, Chen-Ying Lin¹, Jia-Yang Lee¹, Pin-Huan Chen³, Wei-Chang Ray¹, Zhi-Xian Li¹, Han-Chen Tseng¹, Fu-Sheng Chang¹, Chun-Chieh Wang¹, Jeng-Han Tsai³, Ming-Han Liao⁴, 〇Min-Hung Lee¹ (1. Inst. and Undergraduate Program of Electro-Optical Engineering, National Taiwan Normal Univ. (Taiwan), 2. Department of Electronics Engineering, National Yang Ming Chiao Tung Univ. (Taiwan), 3. Department of Electrical Engineering, National Taiwan Normal Univ. (Taiwan), 4. Department of Mechanical Engineering, National Taiwan Univ. (Taiwan))

2022 International Conference on Solid State Devices and Materials |2022年9月27日(火) 12:15 〜 12:30 |PDF ダウンロード

[F-2-01] Study of Write Error Rate in MRAM with Fixed Voltage Input

〇Lihua An¹, Yue Xin¹, Zhengping Yuan¹, Yumeng Yang¹, Zhifeng Zhu¹ (1. ShanghaiTech Univ. (China))

2022 International Conference on Solid State Devices and Materials |2022年9月27日(火) 14:00 〜 14:15 |PDF ダウンロード

[F-2-02] Improved State Stability of PCMO-based RRAM by Asymmetric Programming Voltage for Convolutional Kernels

〇Eunryeong Hong¹, Seonuk Jeon², Heebum Kang¹, Hyun Wook Kim¹, Nayeon Kim¹, Kibong Moon³, Jiyong Woo¹ (1. Kyungpook National University, School of Electronic and Electrical Engineering (Korea), 2. Kyungpook National University, School of Electronics Engineering (Korea), 3. Pohang University of Science and Technoloy, Department of Materials Science and Engineering (Korea))

2022 International Conference on Solid State Devices and Materials |2022年9月27日(火) 14:15 〜 14:30 |PDF ダウンロード