[G-8-01] Investigation of NH₃ Plasma Nitridation on Reliability of Gate-All-Around Stacked Poly-Si Nanosheet Channel Ferroelectric Hf_xZr_1–xO₂ FETs

Dong Ru Hsieh¹, Chia Chin Lee¹, 〇Wei Ju Yeh¹, Cheng En Hsieh¹, Huai En Luo¹, Tien Sheng Chao¹ (1. National Yang Ming Chiao Tung Univ. (Taiwan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 10:45 〜 11:00 |PDF ダウンロード

[G-8-02] Effects of Hf_xZr_1-xO₂ Ferroelectrics/Ge MFIS Interfaces on Polarization Reversal Behavior

〇Koichiro Iwashige¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1. Univ. of Tokyo (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 11:00 〜 11:15 |PDF ダウンロード

[G-8-03] A Comprehensive Study on the Ferroelectric HfO₂-ZrO₂-HfO₂ and ZrO₂-HfO₂-ZrO₂ Nanolaminates

〇Kaixuan Li¹, Yue Peng¹, Wenwu Xiao², Yan Liu¹, Genquan Han^1,3, Yue Hao¹ (1. Wide Bandgap Semiconductor Technology Disciplines State Key Laboratory, School of Microelectronics, Xidian University (China), 2. Xi’an UniIC Semiconductors Company Ltd. (China), 3. Hangzhou Institute of Technology, Xidian University (China))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 11:15 〜 11:30 |PDF ダウンロード

[G-8-04] Improved Ferroelectric Memory Characteristics by Using TiN_x in Novel Ru/TiN_x/Hf_0.5Zr_0.5O₂/TiN Capacitor

〇Asim Senapati¹, Siddheswar Maikap^1,2, Chen- Ying Lin³, Chun- Yu Liao³, Min- Hung Lee³ (1. Chang Gung University (CGU) (Taiwan), 2. Keelung Chang Gung Memorial Hospital (CGMH) (Taiwan), 3. National Taiwan Normal University (NTNU) (Taiwan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 11:30 〜 11:45 |PDF ダウンロード

[G-10-01 (Invited)] Design-Technology Co-Optimization for Future CMOS:
from finFET to CFETs and Backside Power

Geert Hellings¹, Pieter Schuddinck¹, Samantha Liu¹, Shairfe Muhammad Salahuddin¹, Gioele Mirabelli¹, Rongmei Chen¹, Anabela Veloso¹, Anne Jourdain¹, 〇Gaspard Hiblot¹, Naoto Horiguchi¹, Julien Ryckaert¹ (1. imec (Belgium))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 16:00 〜 16:30 |PDF ダウンロード

[G-10-02] Impact of Back-side Power Delivery Network Layout on the FinFET Device Performance

Goutham Arutchelvan¹, Thomas Chiarella¹, Hiroaki Arimura¹, Anabela Veloso¹, Anne Jourdain¹, Eugenio Dentoni Litta¹, Naoto Horiguchi¹, 〇Jerome Mitard¹ (1. imec (Belgium))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 16:30 〜 16:45 |PDF ダウンロード

[G-10-03] Investigation of access resistance components in Si-channel p-FinFET using cascaded devices.

〇Pierre Eyben¹, Goutham Arutchelvan¹, Thomas Chiarella¹, Hiroaki Arimura¹, Romain Ritzenthaler¹, Jérome Mitard¹, Eugenio Dentoni Litta ¹, Naoto Horiguchi¹, Ludovic Goux¹ (1. Imec (Belgium))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 16:45 〜 17:00 |PDF ダウンロード

[G-10-04] Impacts of Annealing Temperature and Atmosphere on (111) and (100) n-Ge MOS Interface Properties with Plasma Oxidation GeO_x and ALD Al₂O₃

〇Xueyang Han¹, Chia-Tsong Chen¹, Mengnan Ke², Ziqiang Zhao¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1. Univ. of Tokyo (Japan), 2. Chiba Univ. (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 17:00 〜 17:15 |PDF ダウンロード

[G-10-05] Low Temperature Selective Growth of Ga-Doped Germanium Source / Drain for pMOS Devices

〇Clement Porret¹, Gianluca Rengo^1,2,3, Mustafa Ayyad¹, Andriy Hikavyy¹, Erik Rosseel¹, Robert Langer¹, Roger Loo¹ (1. imec vzw (Belgium), 2. Quantum Solid State Physics, KU Leuven (Belgium), 3. FWO - Vlaanderen (Belgium))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 17:15 〜 17:30 |PDF ダウンロード

[G-10-06] Atomic Layer Etching of Ti-Compounds: Mechanism and Etch Selectivity Control for Advanced Device Fabrication

Bablu Mukherjee^1,2, René H.J. Vervuurt³, Airah Peraro Osonio², 〇Takayoshi Tsutsumi², Masaru Hori², Nobuyoshi Kobayashi² (1. ASM Japan K.K. (Japan), 2. Nagoya Univ. (Japan), 3. ASM Belgium (Belgium))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 17:30 〜 17:45 |PDF ダウンロード