[C-6-7] Phosphorus Doping by Electron Cyclotron Resonance Plasma for Large Area Poly-Si TFTs

Hiroaki KAKINUMA、Mikio MOHRI、Taiji TSURUOKA (1.Research Laboratory, Oki Electric Industry Co., Ltd.)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-1] Hydrogen in As-Grown Czochralski Silicon Crystals

Akito Hara、Masaaki Koizuka、Masaki Aoki、Tetsuo Fukuda (1.Fujitsu Laboratories Ltd.)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-2] Evaluation of Structurally Metastable Iron-Boron Pairs in Silicon

H. NAKASHIMA、T. SADOH、T. TSURUSHIMA (1.Department of Electrical Engineering, Kyushu University)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-3] The Surface Reaction Rate for Silane on Polycrystalline Silicon Obtained by Using a Fast Wafer-Rotating Reactor

Yuusuke Sato、Naoki Tamaoki、Toshimitsu Ohmine (1.Toshiba R&D Center)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-4] Ti-Silicided Ultra Shallow p+-n Junction Formation by As-Preamorphization through Pre-Deposited Amorphous Si Layer

Yeo Hwan Kim、Kuk Jin Chun、Sang Jik kwon、Jong Duk Lee (1.ISRC, Seoul National University、2.Dept. of Electronics Engineering, Kyungwon University)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-1] Room Temperature Pulsed Operation of 1.5μm VCSELDs with an Optimized MQW Active Layer

K. Uomi、S. J. B. Yoo、A. Scherer、R. Bhat、N. C. Andreadakis、C. E. Zah、M. A. Koza、T. P. Lee (1.Central Research Laboratory, Hitachi Ltd.、2.Bell Communications Research)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-2] A Surface Emitting Laser with a Common-Anode Configuration for Application to the Photonic Parallel Memory

H. Adachi、Y. Kobayashi、T. Chino、K. Matsuda (1.Semiconductor Research Center Matsushita Electric Industrial Co., Ltd.)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-3] Room-Temperature Operation of Vertical-Cavity Surface-Emitting Laser on Si Substrate

Takashi EGAWA、Yoshiaki HASEGAWA、Tsunemasa DEGUCHI、Takashi JIMBO、Masayoshi UMENO (1.Research Center for Micro-Structure Devices, Department of Electrical and Computer Engineering, Nagoya Institute of Technology)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-4] Extremely Low Bias Current Operation of 1.3μm Strained-Layer MQW-DFB Laser for 97ch AM-FDM Transmission

M. Kito、N. Otsuka、K. Fujihara、S. Yamane、M. Ishino、K. Fujito、Y. Matsui (1.Semiconductor Research Center, Information & Communication Research Center Matsushita Electric Industrial Co., Ltd.)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-5] Broadly Wavelength Tunable DBR Lasers with Modified Multiple-Phase-Shift Super Structure Grating

H. Ishii、Y. Tohmori、M. Yamamoto、T. Tamamura、Y. Yoshikuni (1.NTT Opto-electronics Laboratories)

1993 International Conference on Solid State Devices and Materials |PDF ダウンロード