Oral presentation

[20a-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 9:30 AM - 11:30 AM A13 (E304)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:30 AM - 9:45 AM

[20a-A13-1] High-Temperature Nanoimprinting on Metal Films

^○Harutaka Mekaru¹ (AIST¹)

9:45 AM - 10:00 AM

[20a-A13-2] Inclination of Pattern’s Sidewalls by Laser Writing and Reflow Treatment

^○Harutaka Mekaru¹ (AIST¹)

10:00 AM - 10:15 AM

[20a-A13-3] Fabrication of LaRuO nano-pattern by rheology printing

^○Koji Nagahara¹, Daisuke Hirose², Jinwang Li², Eisuke Tokumitsu^1,2, Tatsuya Shimoda^1,2 (JAIST¹, GDRC²)

10:15 AM - 10:30 AM

△ [20a-A13-4] Single-nano scale patterning of glass substrate surface by thermal nanoimprint process for novel growth control of thin films

^○Yasuhisa Nozawa¹, Geng Tan¹, Tomoyuki Funabasama¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (Tokyo Tech¹, Kanagawa Industrial Technology Center²)

10:30 AM - 10:45 AM

△ [20a-A13-5] Single-nano patterning on surfaces of glassy materials by thermal nanoimprint

^○Tomoyuki Funabasama¹, Yasuhisa Nozawa¹, Geng Tan¹, Masahiro Mita², Satoru Kaneko^1,3, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (Tokyo Inst. of Tech.¹, Kyodo Int'l Inc.², Kanagawa Ind. Tech. Cent.³)

10:45 AM - 11:00 AM

[20a-A13-6] Room temperature nano imprinting of nano porous glass prepared from phase-separated glass

^○KENJI IMAKITA¹, TAKERU KAMATA¹, MINORU FUJII¹ (Kobe Univ.¹)

11:00 AM - 11:15 AM

[20a-A13-7] Fabrication of 3D glass structure by reversal room temperature nanoimprinting

^○Norihiro Sugano¹, Makoto Okada¹, Yuichi Haruyama¹, Shinji Matsui¹ (Univ. of Hyogo¹)

11:15 AM - 11:30 AM

[20a-A13-8] Fabrication of ordered structures by nanoimprinting using anodic porous alumina molds and its application for super hydrophobic surfaces

^○Kaito Murakoshi¹, Takashi Yanagishita¹, Hideki Masuda¹ (Tokyo Metropolitan Univ.¹)

Oral presentation

[20p-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 1:00 PM - 3:00 PM A13 (E304)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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Lunch 11:30～13:00 （11:30 AM - 1:00 PM）

1:00 PM - 1:15 PM

[20p-A13-1] Fabrication of high aspect Si patterns from micron to nano size linewidths

^○Hiroaki Kawata¹, Kazuma Shimomukai¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (Osaka Pref. Univ,¹)

1:15 PM - 1:30 PM

[20p-A13-2] Fabrication of Chemical Guide Pattern by thermal Nanoimprinting for Chemoepitaxy of PS-b-PMMA

^○hitomi wakaba¹, makoto okada¹, syuso iyoshi¹, yuichi haruyama¹, shinji matsui¹ (Univ. of Hyogo¹)

1:30 PM - 1:45 PM

[20p-A13-3] Study of the Relationship between Antisticking Layer Deterioration and Demolding forces on Repeated UV nanoimprint

^〇Shuso Iyoshi¹, Makoto Okada¹, Yuichi Haruyama¹, Masaru Nakagawa², Hiroshi Hiroshima³, Shinji Matsui¹ (Univ. of Hyogo¹, Tohoku Univ.², AIST³)

1:45 PM - 2:00 PM

[20p-A13-4] Nanoimprinting without anti-sticking layer by using the resin added fluorosurfactant

^○Takahiro Oyama¹, Tsuneo Yamashita², Makoto Okada¹, Shuso Iyoshi¹, Yuichi Haruyama¹, Shinji Matsui¹ (Graduate School of Material Science, Univ. of Hyogo¹, Daikin Industries, Ltd.²)

2:00 PM - 2:15 PM

[20p-A13-5] Simulation Study on Resist Shrinkage in Nanoimprint Lithography

^○(M1)Takamitsu Tochino¹, Kimiaki Uemura¹, Masaaki Yasuda¹, Hiroaki Kawata¹, Yoshihiko Hirai¹ (Osaka Pref.Univ.¹)

2:15 PM - 2:30 PM

[20p-A13-6] Measurement for Cross Section Profile by Small Angle X-ray Scattering

^○Kazuhiko Omote¹, Yoshiyasu Ito¹ (Rigaku Corporation¹)

2:30 PM - 2:45 PM

[20p-A13-7] Evaluation of Molecular Orientation in Photo-cross-linkable Liquid Crystalline Polymer Nanostructure by Measuring Diffraction Efficiency

^○Makoto Okada¹, Risa Hosoda², Mizuho Kondo², Yuichi Haruyama¹, Tomoyuki Sasaki³, Hiroshi Ono³, Nobuhiro Kawatsuki², Shinji Matsui¹ (LASTI, Univ. of Hyogo¹, Graduate School of Engineering, Univ. of Hyogo², Nagaoka Univ. of Technology³)

2:45 PM - 3:00 PM

[20p-A13-8] haracterization of Binary Random Phase Array Fabricated by Nanoimprint Lithography

^○Yoshitaka Nakamura¹, Yasuhisa Inada¹, Akira Hashiya¹, Taku Hirasawa¹ (Panasonic¹)

Sessions

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint