1:30 PM - 1:45 PM
〇Takeshi Hamamoto1, Kazuhiro Koga1, Hiroshige Kogayu1, Junichi Hattori2,3, Koichi Fukuda2,3, Khumpuang Sommawan1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.AIDL)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)
Kuniyuki Kakushima(Tokyo Tech), Masato Sone(Tokyo Tech)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
1:30 PM - 1:45 PM
〇Takeshi Hamamoto1, Kazuhiro Koga1, Hiroshige Kogayu1, Junichi Hattori2,3, Koichi Fukuda2,3, Khumpuang Sommawan1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.AIDL)
1:45 PM - 2:00 PM
〇Kazuhiro Koga1, Y. X. Liu2, Fumito Imura1,2, Masashi Kase2, Shuichi Noda2, Kazumasa Nemoto2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
2:00 PM - 2:15 PM
〇kazushige sato1,4, Takashi Chiba1,4, Masao Terada1,4, Kengo Hamada1,4, Yoshiyuki Nakayama3, Yoshiaki Kanamori3, Hiroyuki Tanaka2, Masashi Kase2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.Tohoku Univ., 4.Sakaguchi E.H VOC Corp.)
2:15 PM - 2:30 PM
〇Fumito Imura1, Takafumi Yoshinaga2, Kayo Kamasaki2, Toshihiro Kikuno2, Michihiro Inoue1, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.AIST, 2.Kumamotobosei, 3.MINIMAL)
2:30 PM - 2:45 PM
〇Hiroshige Kogayu1, Hiroyuki Tanaka1,2, Fumito Imura1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
3:00 PM - 3:15 PM
〇Fumito Imura1, Shuhei Nakamichi2, Michihiro Inoue1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
3:15 PM - 3:30 PM
〇Kana Onishi1, Hiroshi Nishizato1, Tatsuya Hayashi1, Wataru Sakai1, Jun Hirose1, Shuichi Noda2, Hiroshige Kogayu3, Sommawan Khumpuang2,3, Shiro Hara2,3 (1.HORIBA STEC Co., Ltd., 2.AIST, 3.MINIMAL)
3:30 PM - 3:45 PM
〇Shuichi Noda1, Hiroshige Kogayu2, Wataru Sakai3, Jun Hirose3, Tatsuya Hayashi3, Kana Onishi3, Hiroshi Nishizato3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.HORIBA STEC)
3:45 PM - 4:00 PM
〇Mickael Lozach1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.Minimal Fab Promoting Organization, 2.National Institute of Advanced Science and Technology (AIST))
4:00 PM - 4:15 PM
〇Hideyuki Watanabe1, Kazumasa Nemoto1, Noriko Miura2, Masashi Kase1, Takashi Yajima1, Shuichi Noda1, Hitoshi Umezawa1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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