[A-3-4] Resistivity Reduction of Polycrystalline Silicon Films by Laser Annealing

Susumu KOHYAMA、Shinji ONGA、Kenji SHIBATA、Hisakazu IIZUKA (1.Semiconductor Device Engineering Lab. Toshiba Corporation)

1979 International Conference on Solid State Devices |PDF ダウンロード

[A-3-5] Improvement in Electrical Properties of Laser Annealed Ion Implanted GaAs

B. J. Sealy、M. H. Badawi、K. G. Stephens (1.Department of Electronic and Electrical Engineering、2.University of Surrey)

1979 International Conference on Solid State Devices |PDF ダウンロード

J. BOREL (1.LETI-EFCIS)

1979 International Conference on Solid State Devices |PDF ダウンロード

Katsutoshi Izumi、Masanobu Doken、Hisashi Ariyoshi (1.Research and Development Bureau、2.and Musashino Electrical Communication Laboratory N.N.T.)

1979 International Conference on Solid State Devices |PDF ダウンロード

N. Sasaki、M. Nakano、T. Iwai (1.IC Division、2.Fujitsu Limited)

1979 International Conference on Solid State Devices |PDF ダウンロード

K. Lehovec、Shi-Tron Lin (1.University of Southern California)

1979 International Conference on Solid State Devices |PDF ダウンロード

D. Kranzer、H. Murrmann (1.Siemens AG、2.Integrated Circuit Division)

1979 International Conference on Solid State Devices |PDF ダウンロード

Toshitaka Fukushima、Koji Ueno (1.IC Division、2.Fujitsu Lid.)

1979 International Conference on Solid State Devices |PDF ダウンロード

H. Sakurai、Y. Akasaka、K. Kijima (1.LSI Development Laboratory、2.Mitsubishi Electric Corporation)

1979 International Conference on Solid State Devices |PDF ダウンロード

N. Miyahara、S. Yamada、M. Yamane、K. Saito、E. Arai、M. Sunazawa (1.Musashino Electrical Communication Laboratory、2.N.T.T.)

1979 International Conference on Solid State Devices |PDF ダウンロード