[A-9-4] Deposition of PSG Film by Photo-CVD

H. Itoh, M. Hatanaka, Y. Akasaka, H. Nakata (1.LSI R&D Lab., Mitsubishi Electric Corp.)

1984 International Conference on Solid State Devices and Materials |PDF Download

[A-10-1] Photo-Excited Dry Etching for VLSI's

Y. Horiike, M. Sekine, K. Horioka, T. Arikado, H. Okano (1.Toshiba VLSI Research Center, Toshiba Corporation)

1984 International Conference on Solid State Devices and Materials |PDF Download

Seiichi Miyazaki, Hiroharu Hirata, Masataka Hirose (1.Department of Electrical Engineering, Hiroshima University)

1984 International Conference on Solid State Devices and Materials |PDF Download

Shin Yokoyama, Yasuhiro Yamakage, Masataka Hirose (1.Department of Electrical Engineering, Hiroshima University)

1984 International Conference on Solid State Devices and Materials |PDF Download

Mizuho Morita, Tadashi Kubo, Toshihiro Ishihara, Masataka Hirose (1.Department of Electrical Engineering, Hiroshima University)

1984 International Conference on Solid State Devices and Materials |PDF Download

Seitaro Matsuo (1.Atsugi Electrical Communication Laboratory, NTT)

1984 International Conference on Solid State Devices and Materials |PDF Download

Ken Ninomiya, Keizo Suzuki, Shigeru Nishimatsu (1.Central Research Laboratory, Hitachi Ltd.)

1984 International Conference on Solid State Devices and Materials |PDF Download

Shin-ichiro Kimura, Eiichi Murakami, Kiyoshi Miyake, Terunori Warabisako, Hideo Sunami (1.Central Research Laboratory, Hitachi Ltd.)

1984 International Conference on Solid State Devices and Materials |PDF Download

T. Fukano, T. Ito, T. Hisatsugu, H. Ishikawa (1.FUJITSU LABORATORIES LTD.)

1984 International Conference on Solid State Devices and Materials |PDF Download

Kuniyoshi YOSHIKAWA, Yoshihide NAGAKUBO, Koichi KANZAKI (1.Semiconductor Device Engineering Laboratory, TOSHIBA Corporation)

1984 International Conference on Solid State Devices and Materials |PDF Download

210 results (111 - 120)