[C-2-1] Low Temperature Processes using Ni-induced Crystallization Technique for Monolithic Three Dimensional Integration

J. H. Park¹, M. Tada^1,2, H. Peng¹, K. C. Saraswat¹ (1.Stanford Univ., USA, 2.NEC Corp., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

[C-2-2] Narrow Trench Filled Source/Drain Contact for 3D MOSFET

H. B. Lee¹, S. H. Ahn¹, B. G. Kim¹, W. C. Choi¹, J. H. Jung¹, J. H. Lee¹, S. H. Hahm¹ (1.Kyungpook National Univ., Korea)

2008 International Conference on Solid State Devices and Materials |PDF Download

H. Nagase¹, A. Tanabe¹, K. Umeda¹, T. Watanabe¹, Y. Hayashi¹ (1.NEC Electronics Corp., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

H. Aoki¹, D. Watanabe¹, N. Ooi¹, J. Jong-Hyeon¹, C. Kimura¹, T. Sugino¹ (1.Osaka Univ., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

M. Imai¹, Y. Yamashita², T. Futatsuki², M. Shiohara¹, S. Kondo¹, S. Saito¹ (1.Selete, 2.Organo Corp., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

M. Hara¹, D. Watanabe¹, C. Kimura¹, H. Aoki¹, T. Sugino¹ (1.Osaka Univ., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

Y. Ando¹, K. Kasahara¹, K. Ueda¹, K. Hamaya¹, Y. Nozaki¹, T. Sadoh¹, Y. Maeda², K. Matsuyama¹, M. Miyao¹ (1.Kyushu Univ., 2.Kyoto Univ., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

S. Yada¹, S. Sugahara², M. Tanaka¹ (1.Univ. of Tokyo, 2.Tokyo Tech., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

P. N. Hai¹, B. Yu¹, S. Ohya^1,2, M. Tanaka^1,2 (1.Univ. of Tokyo, 2.JST, Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

Y. Gyoda¹, J. Hayafuji¹, M. Yarimizu¹, W. Terui¹, S. Sugahara¹, H. Munekata¹ (1.Tokyo Tech., Japan)

2008 International Conference on Solid State Devices and Materials |PDF Download

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