[G-7-04] Implementation of a Monolithic Three-Axis Accelerometer Using an Improved CMOS MEMS Process

^○S.-H. Tseng¹, Y.-J. Wang¹, C.-Y. Yeh¹, H.-H. Tsai¹, Y.-Z. Juang¹ (1.National Chip Implementation Center (Taiwan))

2018 International Conference on Solid State Devices and Materials |2018年9月13日(木) 10:00 〜 10:15 |PDF ダウンロード

[G-7-05] Vacuum-Packaged Resonant Microsensor for Photoacoustic Detection of Glucose in a Gelatin-based Tissue Model

^○I. Latif¹, Z. An¹, M. Toda¹, T. Ono¹ (1.Tohoku University (Japan))

2018 International Conference on Solid State Devices and Materials |2018年9月13日(木) 10:15 〜 10:30 |PDF ダウンロード

[G-7-06 (Late News)] Fabrication and Evaluation of Aluminum Nitride/MOSFET Based Strain Sensor with High Gauge Factor

^○M. Zhu¹, N. Inomata¹, N. Adachi², A. Sakurai², M. Nomura², T. Ono¹ (1.Tohoku Univ. (Japan), 2.Murata Manufac. Co., Ltd. (Japan))

2018 International Conference on Solid State Devices and Materials |2018年9月13日(木) 10:30 〜 10:45 |PDF ダウンロード

[H-1-01 (Invited)] Elastic Strain Engineering of Group IV Materials for Low-Threshold On-Chip Lasers

^○D. Nam¹ (1.Nanyang Technological Univ. (Singapore))

2018 International Conference on Solid State Devices and Materials |2018年9月11日(火) 14:00 〜 14:30 |PDF ダウンロード

[H-1-02] Strain Management in Germanium-On-Insulator (GeOI) Substrates for Photonic Applications

^○J. Widiez¹, M. Bertrand¹, C. Morales¹, M. Cordeau¹, P. Gergaud¹, A. Grenier¹, J.-M. Hartmann¹, I. Degirmencioglu¹, A. Chelnokov¹, V. Reboud¹ (1.CEA LETI (France))

2018 International Conference on Solid State Devices and Materials |2018年9月11日(火) 14:30 〜 14:45 |PDF ダウンロード

[H-1-03] Order-of-magnitude enhancement of direct-gap photoluminescence from patterned Ge epitaxial layers on Si induced by wet chemical treatment

^○M. Yako¹, Y. Ishikawa² (1.Univ. of Tokyo (Japan), 2.Toyohashi Univ. of Tech. (Japan))

2018 International Conference on Solid State Devices and Materials |2018年9月11日(火) 14:45 〜 15:00 |PDF ダウンロード

[H-1-04] Vertically Light-Emitting Ge Micro-Gears Generating Orbital Angular Momentum

^○A. AlAttili¹, D. Burt¹, Z. Li¹, N. Higashitarumizu², F.Y. Gardes¹, K. Oda³, Y. Ishikawa², S. Saito¹ (1.Univ. of Southampton (UK), 2.Univ. of Tokyo (Japan), 3.Hitachi, Ltd. (Japan))

2018 International Conference on Solid State Devices and Materials |2018年9月11日(火) 15:00 〜 15:15 |PDF ダウンロード

[H-2-01 (Invited)] Artificial neural networks based on Mach-Zehnder interferometers in a Si PIC

^○Y. Shen^1,2 (1.MIT (USA), 2.Lightelligence Inc. (USA))

2018 International Conference on Solid State Devices and Materials |2018年9月11日(火) 15:30 〜 16:00 |PDF ダウンロード

[H-2-02] Evaluation of Advanced Process Integration Options for next Generation of Si-Photonics platform

^○F. Boeuf¹, C. Baudot¹, P. Le Maitre¹, N. Vulliet¹, J. Planchot¹, L. Babaud¹, J.F. Carpentier¹, S. Messaoudene², M. Ben-Khedim¹, P. Orlandi³, C. Durand¹, A. Fincato³, S. Cremer¹ (1.STMicroelectronics Crolles (France), 2.CEA-LETI (France), 3.STMicroelectronics Agrate (Italy))

2018 International Conference on Solid State Devices and Materials |2018年9月11日(火) 16:00 〜 16:15 |PDF ダウンロード

[H-2-03] Optimization of a 64Gbps O-band Thin-Rib PN Junction Mach-Zehnder Modulator Fabricated on a 200mm Silicon Photonics Platform

^○B. Szelag¹, B. Charbonnier¹, O. Lemonnier¹, S. Brision¹, B. Blampey¹, S. Bernabé¹ (1.CEA-LETI (France))

2018 International Conference on Solid State Devices and Materials |2018年9月11日(火) 16:15 〜 16:30 |PDF ダウンロード