[PS-10-01] Reliability of 60-nm scale CAAC-IGZO FET

^○H. Kimura¹, D. Shimada¹, N. Kamata¹, M. Motoyoshi¹, Y. Asami¹, K. Sugaya¹, R. Hodo¹, T. Murakawa¹, M. Takahashi¹, S. Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:30 〜 16:31 |PDF ダウンロード

[PS-10-02] Loading Effect in the Channel Etching Process of Crystalline In-Ga-Zn-Oxide FETs

^○R. Arasawa¹, S. Sasagawa¹, E. Takahashi¹, K. Tochibayashi¹, Y. Komatsu¹, S. Ito¹, K. Fukushima¹, R. Hodo¹, S. Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:31 〜 16:32 |PDF ダウンロード

[PS-10-03] A Versatile Method for Preparing Metal Oxide Nanostructures via Laser Direct Patterning

^○S.Y. Yu^1,2, C.C. Yeh^1,2, F. Stehlin², H.W. Zan¹, A. Spangenberg², O. Soppera² (1.National Chiao Tung Univ. (Taiwan), 2.Inst. of Materials Sci. of Mulhouse (France))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:32 〜 16:33 |PDF ダウンロード

[PS-10-04] Improved Electrical Stability of Zr-IGZO Thin-Film Transistors with Zr_0.85Si_0.15O₂ Gate Dielectric

Z.K. Zhuang¹, S.J. Wang¹, S.Y. Wang¹, H.Y. Chen¹,^○C.K. Liao¹, S.T. Hsiao¹, B.C. You¹, R.M. Ko¹ (1.Univ. of Cheng Kung (Taiwan))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:33 〜 16:34 |PDF ダウンロード

[PS-10-05] Withdrawn

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:34 〜 16:35

[PS-10-06] [No-Show]Effects of Microwave Annealing on IGZO Layer Deposited by AP-PECVD for RRAM Device

^○C.H. Wu¹, K.M. Chang², S.N. Kuo², Y.C. Chiang², Y.X. Zhang², Y.M. Chen², W.Y. Liu² (1.Chung Hua Univ. (Taiwan), 2.National Chiao Tung Univ. (Taiwan))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:35 〜 16:36

[PS-10-07] [No-Show]Low Operation Voltage Organic and Amorphous Oxide Thin-film Transistors Based on Solution-processed High-k Gate Dielectrics

Q. Ke¹, J. Zheng¹, C. Chen¹, Z. Wang¹,^○C. Liu¹ (1.Sun Yat-Sen Univ. (China))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:36 〜 16:37

[PS-10-08] Performance of In₂TiO₅ Based Bio-sensor Treated by CF₄ Plasma

^○C.F. Lin¹, C.H. Kao^1,2, Y.W. Liu¹, C.H. Wang¹, T. Chakraborty¹, M. Das¹, C.Y. Lin² (1.Univ. of Chang Gung (Taiwan), 2.Res.of Chang Gung Memorial Hospital (Taiwan))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:37 〜 16:38 |PDF ダウンロード

[PS-10-09] Conduction and valence band offsets of ZnO/β-Ga₂O₃interface measured by X-ray photoelectron spectroscopy

^○S.M. Sun¹, W.J. Liu¹, Y.P. Wang¹, Y.W. Huan¹, H. Liu¹, Y. Shao¹, B. Zhu¹, R.H. Horng², C.T. Xia³, S.J. Ding¹, D.W. Zhang¹ (1.Fudan Univ. (China), 2.National Chiao Tung Univ. (Taiwan), 3.Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (China))

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:38 〜 16:39 |PDF ダウンロード

[PS-10-10] Withdrawn

2018 International Conference on Solid State Devices and Materials |2018年9月12日(水) 16:39 〜 16:40