[A-8-2] Photo-Enhanced Boron-Doping in Low-Temperature Silicon Epitaxy and Its FTIR Study

S. Watanabe、T. Yamazaki、Y. Nara、T. Ito (1.FUJITSU LABORATORIES LTD., ATSUGI)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-8-3] A New Dopant Diffusion Modeling Based on Point Defect Kinetics

Takako KASHIO、Koichi KATO (1.ULSI Research Center, Toshiba Corporation)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

H. Fujioka、T. Deguchi、K. Takasaki、K. Kawashima、Y. Ban (1.FUJITSU LTD.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

K. Ishida、T. Matsunaga、S. Miyano、A. Kameyama、N. Toyoda (1.ULSI Research Center, Toshiba Corporation)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Y. Kuriyama、M. Ishibe、M. Asaka、M. Obara、S. Shimizu (1.Toshiba Research and Development Center)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Toshihiko HAMASAKI、Tetsunori WADA (1.ULSI Research Center, Toshiba Corporation)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

A. Tamba、Y. Kobayashi、T. Suzuki、N. Natsuaki (1.Hitachi Research Laboratory, Hitachi Ltd.、2.Central Research Laboratory, Hitachi Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Tadashi SAITOH、Masao KONDO、Tsuyoshi UEMATSU、Masao TAMURA (1.Central Research Laboratory, Hitachi, Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

W. Josquin、D. de Lang、M. van Iersel、J. van Dijk、A. van de Goor、E. Bladt (1.Philips Research Laboratories)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Eronides F. da Silva, Jr.、Yasushiro Nishioka、T. -P. Ma (1.Universidade Federal de Pernambuco Departamento de Fisica、2.Cidade Universitaria)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード