Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)
Tatsuya Okada(Univ. of the Ryukyus), Reo Kometani(Univ. of Tokyo)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:00 PM - 1:15 PM
〇Hiroyoshi Hongoh2, Sommawan Khumpuang2,1, Shiro Hara2,1 (1.AIST, 2.MINIMAL)
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1:15 PM - 1:30 PM
〇Kazumasa Nemoto1, Takashi Yajima1, Noriko Miura2, Kazushige Sato2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
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1:30 PM - 1:45 PM
〇kazushige sato1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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1:45 PM - 2:00 PM
〇Takashi Yajima1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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2:00 PM - 2:15 PM
〇Shuichi Noda1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-Kogyo)
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2:15 PM - 2:30 PM
Yuki Kamochi1, 〇Hitoshi Habuka1, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)
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2:30 PM - 2:45 PM
〇Shuhei Nakamichi1, Hiroyuki Tanaka2, Fumito Imura2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MinimalFab, 2.AIST)
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3:00 PM - 3:15 PM
〇Tetsuya Goto1, Seiji Kobayashi2, Thai Quoc Cuong2, Yuki Yabuta3, Shigetoshi Sugawa1, Shiro Hara4,5 (1.NICHe, Tohoku Univ., 2.Kotec, 3.Seinan, 4.AIST, 5.Minimal)
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3:15 PM - 3:30 PM
〇Masashi Kase1, Khumpuang Sommawan1,2, Shirou Hara1,2 (1.AIST, 2.MINIMAL)
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3:30 PM - 3:45 PM
〇Hiroyuki Tanaka1, Yoshiyuki Nozawa2, Toshihiro Hayami2, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.AIST, 2.SPPT, 3.MINIMAL)
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3:45 PM - 4:00 PM
〇Fumito Imura1, Hiroyuki Tanaka1, Kouji Oosawa2, Takuro Kono2, Kenzo Shodo2, Yasuo Terasawa2, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.AIST, 2.NIDEK, 3.MINIMAL)
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4:00 PM - 4:15 PM
〇Takeshi Hamamoto1, Shingo Ura3, Masahiro Matsuda3, Yuji Kitayama4, Satoshi Maruyama4, Sommawan Khumpuang2, Yasunari Shiba4, Tadaaki Tsuchiya3, Shiro Hara2 (1.MINIMAL, 2.AIST, 3.Logic Research, 4.Yokogawa Solution Service)
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4:15 PM - 4:30 PM
〇Hiroshige Kogayu1, Hiroyuki Tanaka2, Fumito Imura2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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