S. T. Chang、C. Y. Lin (1.Department of Electronic Engineering, Chung Yuan Christian University、2.Department of Physics, National Chung Hsing University)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

Yasushi Ishikawa、Yuji Katoh、Mitsuru Okigawa、Seiji Samukawa (1.Intelligent Nano-Process laboratory, Institute of Fluid Science, Tohoku University、2.Sanyo Electric Co., Ltd., Component Group, Semiconductor Company, CCD Business Unit, Development Department)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

Tomoyuki Hamada、Takenori Yamamoto、Hiroyoshi Momida、Tsuyoshi Uda、Takahisa Ohno (1.Institute of Industrial Science, University of Tokyo、2.AdvanceSoft Corporation、3.National Institute for Material Science)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

Kousuke Sano、Masaki Hino、Norihiro Ooishi、Kentaro Shibahara (1.Research Center for Nanodevices and Systems, Hiroshima University)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

Hyun-Su Kim、Jong-Ho Yun、Kwang-Jin Moon、Woong-Hee Sohn、Seong-Hwee Cheong、Sug-Woo Jung、Gil-Heyun Choi、Se-Hoon Kim、Nam-Jin Bae、Sung-Tae Kim、U-In Chung、Joo-Tae Moon (1.Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.、2.CVD Division, COMTECS Co., Ltd.)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

Kou-Chiang Tsai、Wen-Fa Wu、Cheng-Ping Kuan、Chi-Chang Wu、Chuen-Guang Chao (1.Department of Materials Science and Engineering, National Chiao-Tung University、2.National Nano Device Laboratories)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

Atsushi Hidaka、Satoru Yamashita、Takeyoshi Kato、Yasuyuki Shirai、Tadahiro Ohmi (1.University of Tohoku, Department of Electronic Engineering, Graduate School of Engineering、2.University of Tohoku, New Industry Creation Hatchery Center (NICHe))

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

T. Matsukawa、C. Yasumuro、H. Yamauchi、S. Kanemaru、M. Masahara、K. Endo、E. Suzuki、J. Itoh (1.Nanoelectronics Research Institute, AIST)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

M. Kadoshima、K. Akiyama、N. Mise、S. Migita、N. Yasuda、K. Iwamoto、H. Fujiwara、K. Tominaga、M. Ohno、T. Nabatame、A. Toriumi (1.MIRAI-ASET, AIST Tsukuba West 7、2.MIRAI-ASRC, AIST Tsukuba, Japan、3.Department of Materials Science, The University of Tokyo, Japan)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

Tsuyoshi Masuda、Hideyuki Tsuboi、Michihisa Koyama、Momoji Kubo、Akira Miyamoto (1.Department of Applied Chemistry, Tohoku University、2.New Industry Creation Hatchery Center, Tohoku University、3.JST-PRESTO)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード