[P2-14] Dependence of Analog and Digital Performances on Mechanical Film Stress of ILD Layer in Nano-Scale CMOSFETs

S. H. Park、H. H. Ji、Y. G. Kim、H. D. Lee、S. H Baek、K. C. Kim、B. S. Song、H. K. Bae、H. S. Lee、Y. S. Kang、D. B. Kim、J. W. Park (1.System IC PD Center, Hynix Semiconductor Inc.、2.Dept. of Electronics Engineering, Chungnam National University)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P2-15] Damascene Gate CMOSFETs with 30 nm-Scale Gate Length

Sung Hwan Kim、Jeong Dong Choe、Chang Woo Oh、Ming Li、Sang-Yeon Han、Hee Soo Kang、Sung Young Lee、Kyoung Hwan Yeo、Chang Sub Lee、Sung Min Kim、Min Sang Kim、Eun Jung Yoon、Dong Uk Choi、Dong-Won Kim、Donggun Park、Kinam Kim (1.DR and CAE Team, R&D Center, Samsung Electronics Co)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P2-16] Effectiveness of Optimum Body Bias for Leakage Reduction in High-K CMOS Circuits

Pradeep Kumar Chawda、Bulusu Anand、V. Ramgopal Rao (1.Department of Electrical Engineering, IIT Bombay)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P2-17] Monte Carlo simulation of nanoscale n-i-n diode: Influence of the hot-electron in drain region on ballistic transport

Takashi Kurusu、Kenji Natori (1.Institute of Applied Physics, University of Tsukuba)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P2-18] Shot Noise Measurement in p-i-n Diode and Its Analysis

K. Hara、O. Matsushima、G. Suzuki、D. Navarro、K. Konno、Y. Isobe、M. Miura-Mattausch (1.Graduate School of Advanced Sciences of Matter, Hiroshima University)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P2-19] A Novel High Ruggedness Power MOSFET With a Planar Oxide Deep P+ Implant Structure

Feng-Tso Chien、Ming-Hung Lai、Shih-Tzung Su、Ching-Ling Cheng (1.Dept. of Electronic Engineering, Feng Chia University、2.R&D Dept., Chino-Excel Technology Crop.)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P2-20] Novel Nitrogen doped Ni SALICIDE Process for Nano-Scale CMOS Technology

Soon-Young Oh、Jang-Gn Yun、Bin-Feng Huang、Yong-Jin Kim、Hee-Hwan Ji、Ui-Sik Kim、Han-Sub Cha、Sang-Bum Heo、Jeong-Gun Lee、Jin-Suk Wang、Hi-Deok Lee (1.Dept. of Electronics Engineering, Chungnam National University、2.System IC R&D Division, Hynix Semiconductor Inc.)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P2-21L] Design and Analysis of On-Chip Tapered Transformers for Silicon RFICs

Ming-Hsiang Cho、Guo-Wei Huang、Chia-Sung Chiu、Kun-Ming Chen、An-Sam Peng (1.National Nano Device Laboratories)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P3-1] The development of TiN Bottom Electrodes Isolation Methods for the Fabrication of sub-micron DRAM Capacitor

Yong-Tae Cho、Sang-Hoon Cho、Hae-Jung Lee、Suk-Ki Kim、Jong-Bum Park、Jong-Min Lee、Bong-Ho Choi、Jin-Woong Kim (1.HYNIX Semiconductor Inc., Memory R & D Division)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P3-2] Effect of Post Thermal Processes on Nitride/W/WNx/poly-Si Gate Stack

Heung-Jae Cho、Se-Aug Jang、Yong Soo Kim、Kwan-Yong Lim、Jae-Geun Oh、Jung-Ho Lee、Tae-Su Park、Tae-Sun Back、Jun-Mo Yang、Hong-Seon Yang、Hyun-Chul Sohn、Jin-Woong Kim (1.Memory R&D Division, Hynix Semiconductor Inc.)

2004 International Conference on Solid State Devices and Materials |PDF ダウンロード

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