Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)
Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:00 PM - 1:15 PM
〇Hiroyoshi Hongoh1, Sommawan Khumpuang1,2, Shiro Hara1,2,3 (1.MINIMAL, 2.AIST, 3.Hundred)
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1:15 PM - 1:30 PM
〇Hiroshige Kogayu1, Hiroyuki Tanaka2, Fumito Imura2,3, Sommawan Khumpuang1,2, Shiro Hara1,2,3 (1.MINIMAL, 2.AIST, 3.Hundred)
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1:30 PM - 1:45 PM
〇Atsushi Furukawa1, Shinya Sato1 (1.TDSC)
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1:45 PM - 2:00 PM
〇Hajime Karasawa1, Yuki Yoshimoto1, Shogo Shimada1, Tomoya Nagahashi1, Ryota Hariike1 (1.KOKUSAI ELECTRIC)
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2:15 PM - 2:30 PM
〇Tetsuya Goto1, Tomoyuki Suwa1, Shigetoshi Sugawa1 (1.NICHe, Tohoku Univ.)
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2:30 PM - 2:45 PM
〇Tatsuya Sagawa1, Akito Hara1 (1.Tohoku Gakuin Univ.)
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2:45 PM - 3:00 PM
〇Nobuo Sasaki1,2, Satoshi Takayama2, Rikuto Sasai2, Yukiharu Uraoka2 (1.Sasaki Consulting, 2.NAIST)
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3:00 PM - 3:15 PM
〇Satoshi Takayama1, Sasaki Nobuo2,1, Uraoka Yukiharu1 (1.NAIST, 2.Sasaki Consulting)
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3:30 PM - 3:45 PM
〇Manabu Tezura1, Takanori Asano1, Riichiro Takaishi1, Mitsuhiro Tomita1, Masumi Saitoh1, Hiroki Tanaka1 (1.Institute of Memory Technology R&D, Kioxia Corp.)
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3:45 PM - 4:00 PM
〇WENCHANG YEH1, Masato Ohya1 (1.Shimane Univ.)
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4:00 PM - 4:15 PM
〇(M2)Longxiang Men1, Yuta Ito1, Junghyeok Shin1, Ryo Yokogawa1,2, Atsushi Ogura1,2, Kazuto Kawakatsu3, Jun Yoshigiwa3, Koichiro Saga3, Hayato Iwamoto3 (1.Meiji Univ., 2.MREL, 3.Sony Semiconductor Solutions Corporation)
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4:15 PM - 4:30 PM
〇Koki Nozawa1, Takeshi Nishida1,2, Takashi Suemasu1, Kaoru Toko1 (1.Univ. of. Tsukuba, 2.JSPS Research Fellow)
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4:45 PM - 5:00 PM
Takashi Kajiwara1, Tatsuya Okada2, Koswaththage Charith Jayanada2, Takashi Noguchi2, 〇Taizoh Sadoh1 (1.Kyushu Univ., 2.Univ. of the Ryukyus)
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5:00 PM - 5:15 PM
〇Tatsuya Okada1, Takashi Noguchi1, Mitsuoki Hishida2, Kentaro Miyano2, Naohiko Kobata2, Masaki Nobuoka2 (1.Univ. Ryukyus, 2.Panasonic Connect)
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5:15 PM - 5:30 PM
〇Yuki Okamoto1, Yasuyuki Yamamoto1, Tomoya Muramoto1, Masaaki Ichiki1, Takeshi Kobayashi1 (1.AIST)
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