The 70th JSAP Spring Meeting 2023

Session information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)

Kazuhiro Karahashi(Osaka univ.), Sumiko Fujisaki(Hitachi, Ltd.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

×

Authenticate

×

Only registered participants can view the abstract PDF.
◆Early bird registrant
Participant ID and password has been sent to your registered email address on February 27.
◆Late registrants
Participant ID and password will be included in a payment confirmation email.
» Participant Log In