The Japan Society of Applied Physics

[E-5-1L] Defect-free Isolation on High-Thermal-Conductivity SOI Substrates for Complementary BiCMOS Technology

K. Van Wichelen1、P. Ong1、A. Moussa1、D. Radisic1、K. Devriendt1、S. Halder1、K. Kenis1、W. Lee1、B. Vandevelde1、C. Soonekindt1、S. A. Hadi1、T. Smet1、S. Van Huylenbroeck1、S. Decoutere1、M. Seacrist2、M. Ries2、V. Drobny3、R. Wise3 (1.IMEC(Belgium)、2.MEMC(US)、3.Texas Instruments(US))

2009 International Conference on Solid State Devices and Materials |PDF ダウンロード