[C-9-2] SOI-MOS/Diode Composite Photodetector Device

Yuko Uryu、Tanemasa Asano (1.Center for Microelectronic Systems, Kyushu Institute of Technology)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-3] Substrate Characteristics of Nanocleave SOI Wafers

I. J. Malik、S. W. Bedell、H. Kirk、M. Korolik、S. Kang、M. I. Current、F. J. Henley (1.Silicon Genesis Corporation)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-4] Evaluation of SOI Substrates by Positron Annihilation

Atsushi Ogura、Akira Uedono、Shoichiro Tanigawa (1.Silicon Systems Res. Labs., System Devices and Fundamental Res., NEC Corp.、2.Institute of Applied Physics, University of Tsukuba)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-5] Charging Damage of SOI Wafer Diagnosed by Scanning Maxwell-Stress Microscopy

T. Matsukawa、H. Fujii、S. Kanemaru、M. Nagao、H. Yokoyama、J. Itoh (1.Electrotechnical Laboratory、2.Materials Research Laboratory, Kobe Steel, LTD.)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-6] Thermally-Induced Structural Changes of Ultrathin Silicon-on-Insulator Structure

Ratno Nuryadi、Yasuhiko Ishikawa、Michiharu Tabe (1.Research Institute of Electronics, Shizuoka University)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-7-1] Modern Processing Technology for 6-inch GaAs Wafers

Alex McCann、Greg Guth、Burhan Bayraktaroglu (1.ANADIGICS, Inc.)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-7-2] In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N2

Zhi Jin、Hiroshi Takahashi、Tamotsu Hashizume、Hideki Hasegawa (1.Research Center for Interface Quantum Electronics (RCIQE), Hokkaido University)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-7-3] Vertical High Quality Mirrorlike Facet of GaN-Based Device by Reactive Ion Etching

Chin Hsiung Chen、Yan Kuin Su、Shoou Jinn Chang、Jinn Kong Sheu、I Chao Lin (1.Department of Electrical Engineering, National Cheng Kung University)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-7-4] Lateral Thickness Modulation of InGaAs/GaAs Structures by Selective Area MOVPE

T. Terasawa、F. Nakajima、J. Motohisa、T. Fukui (1.Research Center for Interface Quantum Electronics (RCIQE), Hokkaido University)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-7-5] Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Sputtering Method

Shogo Ishizuka、Shinya Kato、Takahiro Maruyama、Katsuhiro Akimoto (1.Institute of Applied Physics, University of Tsukuba)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード