[C-9-2] Potential Characterization of Interconnect Corrosion by Kelvin Probe Force Microscopy

M. Kodera¹, Y. Yoshimizu¹, K. Uchida¹ (1.Toshiba Corp. , Japan)

2011 International Conference on Solid State Devices and Materials |PDF Download

[C-9-3] Oxidation Resistance of Ti Oxide Self-Formed Barrier in Cu Interconnects

K. Ito¹, K. Kohama¹, K. Hamasaka¹, Y. Shirai¹, M. Murakami² (1.Kyoto Univ., 2.The Ritsumeikan Trust , Japan)

2011 International Conference on Solid State Devices and Materials |PDF Download

[C-9-4] Effects of Cu Film Texture and Barrier Structure on Cu Grain Growth

K. Kohama¹, T. Matsumoto¹, K. Ito¹, Y. Shirai¹, M. Murakami² (1.Kyoto Univ., 2.The Ritsumeikan Trust , Japan)

2011 International Conference on Solid State Devices and Materials |PDF Download

[CI-6-1] Silicon Photonics in Next Generation Computers

M. R. Watts¹ (1.MIT , USA)

2011 International Conference on Solid State Devices and Materials |PDF Download

[CI-6-2] High Speed Optoelectronic Devices in Silicon

L. Vivien¹, D. Marris-Morini¹, G. Rasigade¹, M. Ziebell¹, P. Chaysakul¹, X. L. Roux¹, E. Cassan¹, J. M. Fédéli² (1.Univ. Paris Sud, 2.CEA-LETI/MINATEC , France)

2011 International Conference on Solid State Devices and Materials |PDF Download

[CI-6-3] Si Waveguide-Integrated MSM Ge Photodiode

J. Fujikata^1,2, M. Noguchi^1,2, M. Miura^1,2, D. Okamoto^1,2, T. Horikawa^1,3, Y. Arakawa^1,4 (1.PECST, 2.PETRA, 3.AIST, 4.Univ. of Tokyo , Japan)

2011 International Conference on Solid State Devices and Materials |PDF Download

[CI-6-4] Adjacent Channel Crosstalk in 0.18-μm Si CMOS Photodiode Arrays with Body Contact

G.Y. Chen¹, F.P. Chou¹, C.W. Wang¹, Y. M. Hsin¹ (1.National Central Univ. , Taiwan)

2011 International Conference on Solid State Devices and Materials |PDF Download

[CI-6-5] Low-operation Voltage and High-speed Silicon Ring Optical Modulator with p/n Junctions along Waveguide

Y. Amemiya¹, R. Furutani¹, M. Fukuyama¹, S. Yokoyama¹ (1.Hiroshima Univ. , Japan)

2011 International Conference on Solid State Devices and Materials |PDF Download

[CI-7-1] Optical Interconnection based on Silicon photonics

S. Itabashi¹, K. Yamada¹, R. Kou¹, T. Watanabe¹, H. Shinojima¹, H. Nishi¹, T. Tsuchizawa¹ (1.NTT Microsystem Integration Labs. , Japan)

2011 International Conference on Solid State Devices and Materials |PDF Download

[CI-7-2] High Efficient Unidirectional Optical Coupler for Through Silicon Photonic Via in Optoelectronic 3D-LSI

A. Noriki¹, K. W. Lee¹, J. C. Bea¹, T. Fukushima¹, T. Tanaka¹, M. Koyanagi¹ (1.Tohoku Univ. , Japan)

2011 International Conference on Solid State Devices and Materials |PDF Download

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