[E-4-01 (Invited)] Polysilicon channel in 3-D NAND: Challenges and Strategies for Improvement

^○Sivaramakrishnan Ramesh¹ (1. imec (Belgium))

2023 International Conference on Solid State Devices and Materials |2023年9月7日(木) 10:45 〜 11:15 |PDF ダウンロード

[E-4-02] Compact Thermally Stable High Voltage FinFET with 40nm Tox and Lateral Break-Down>35V for 3D NAND Flash Periphery Application

^○Alessio Spessot¹, Philippe Matagne¹, Hiroaki Arimura¹, Jishnu Ganguly¹, Romain Ritzenthaler¹, Joao Bastos¹, Ritam Sarkar¹, Elena Capogreco¹, Yangyin Chen^1,2, Naoto Horiguchi¹ (1. imec (Belgium), 2. Western Digital (Belgium))

2023 International Conference on Solid State Devices and Materials |2023年9月7日(木) 11:15 〜 11:30 |PDF ダウンロード

[E-4-03] The Effect of Crystallinity of Channel Silicon Formed by Two Different Metal Induced Lateral Crystallization (MILC) on Cell Current Distribution in 3D Flash Memory

^○Haruki Matsuo¹, Hiroki Yamashita¹, Yusuke Shimada¹, Noritaka Ishihara¹, Satoshi Seto¹, Sho Morita¹, Masafumi Ukishima¹, Kazuya Uejima¹, Yusuke Arayashiki¹, Suzuka Kajiwara¹, Akiyuki Murayama¹, Katsuya Nishiyama¹, Kikuko Suhimae¹, Shinji Mori¹, Yuta Saito¹, Takeshi Shundo¹, Yurika Kanno¹, Hiroyuki Kamiya², Yasuhiro Uchiyama¹, Fumiki Aisou¹, Katsuyuki Sekine¹, Norio Ohtani¹ (1. Kioxia Corp. (Japan), 2. Western Digital Corp. (United States of America))

2023 International Conference on Solid State Devices and Materials |2023年9月7日(木) 11:30 〜 11:45 |PDF ダウンロード

[E-4-04] Optimization of Cell to Cell Space Material on 3D NAND Flash Memory

^○Daewoong Kang¹, Inyoung Lee², Yunjae Oh², Yunjae Suh³, Il Hwan Cho² (1. Seoul National University (Korea), 2. Myongji Univ. (Korea), 3. Soongsil Univ. (Korea))

2023 International Conference on Solid State Devices and Materials |2023年9月7日(木) 11:45 〜 12:00 |PDF ダウンロード

[E-5-01 (Late News)] Electrical Characteristic Degradation of Ultra-Scaled IGZO-TFTs Induced by Bias- and Temperature-Dependent Hot Carrier Stresses

^○Muhammad Aslam^1,2, Shu-Wei Chang³, Yao Jen Lee⁴, Yiming Li^1,2,4,5,6,7, Wen-Hsi Lee³ (1. Parallel and Scientific Computing Laboratory, National Yang Ming Chiao Tung Univ. (Taiwan), 2. EECS International Graduate Program, National Yang Ming Chiao Tung Univ. (Taiwan), 3. Department of Electrical Engineering, National Cheng Kung Univ. (Taiwan), 4. Institute of Pioneer Semiconductor Innovation, National Yang Ming Chiao Tung Univ. (Taiwan), 5. Institute of Communications Engineering, National Yang Ming Chiao Tung Univ. (Taiwan), 6. Institute of Communications Engineering, National Yang Ming Chiao Tung Univ. (Taiwan), 7. Department of Electronics and Electrical Engineering, National Yang Ming Chiao Tung Univ. (Taiwan))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 09:00 〜 09:15 |PDF ダウンロード

[E-5-02] Improved C-axis-aligned Crystalline Oxide Semiconductor FET Suitable for Scaling and Monolithic Stacking for Higher Integration of Integrated Circuit

^○Hiromi Sawai¹, Motomu Kurata¹, Tsutomu Murakawa¹, Yoshinori Ando¹, Takako Kikuchi¹, Kunihiro Fukushima¹, Ryota Eto¹, Shinya Sasagawa¹, Kentaro Sugaya¹, Ryota Hodo¹, Yuki Okamoto¹, Toshiki Mizuguchi¹, Hitoshi Kunitake¹, Shunpei Yamazaki¹ (1. Semiconductor Energy Laboratory Co., Ltd. (Japan))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 09:15 〜 09:30 |PDF ダウンロード

[E-5-03] Rapid Thermal Crystallization of H-doped InO _x for Thin Film Transistors

^○Xiaoqian Wang¹, Mamoru Furuta¹ (1. Kochi Univ. of Tech. (Japan))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 09:30 〜 09:45 |PDF ダウンロード

[E-5-04] Role of Weakly-bonded and Excess Oxygen in a-In2O3 Thin-Film Transistors

^○Jiayi Wang¹, Kuo Zhang^1,2, Yuxuan Li^1,2, Nannan You¹, Yang Xu¹, Ling Li^1,2, Shengkai Wang^1,2 (1. Inst. of Microelectron. of CAS (China), 2. Univ. of CAS (China))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 09:45 〜 10:00 |PDF ダウンロード

[E-5-05] Variable Photocurrent Method Characterization of Subgap Defects in In ₂O ₃ TFT

^○Kuo Zhang^1,2, Jiayi Wang¹, Yang Xu¹, Nannan You¹, Qian Zhang^1,2, Yu Wang^1,2, Shengkai Wang^1,2 (1. Inst. of Microelectronics of the Chinese Academy of Sci. (China), 2. Univ. of Chinese Academy of Sci. (China))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 10:00 〜 10:15 |PDF ダウンロード

[E-6-01] Using thin-film transistor with thick oxygen-doped SZTO channel and patterned Pt/NiO capping layer to enhance ultraviolet light sensing performance

^○Chang- Yu Liao¹, Rong-Ming Ko², Yu-Hao Chen¹, Chien-Hung Wu³, Shui-Jinn Wang^1,2 (1. Inst. of Microelectronics, Department of Electrical Eng., National Cheng Kung Univ., Tainan (Taiwan), 2. Academy of Innovative Semiconductor and Sustainable Manufac., National Cheng Kung Univ., Tainan (Taiwan), 3. Department of Optoelectronics and Materials Eng., Chung Hua Univ., Hsinchu (Taiwan))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 10:45 〜 11:00 |PDF ダウンロード