The Japan Society of Applied Physics

633件中(191 - 200)

[H-5-02] Ferroelectric Properties Tuning in Hf 0.5Zr 0.5O 2 Thin Films via Controlling the Crystal Orientations of Single-crystalline TiN Substrates

Yuyan Fan1,2, Shunda Zhang3, Yulong Dong1,2, Danyang Chen1,2, Jiahui Zhang3,4, Jingquan Liu1, Mengwei Si1, Yanwei Cao3, Xiuyan Li1 (1. National Key Lab. of Sci. and Tech. on Micro/Nano Fabrication (China), 2. Department of Micro/Nano Electronics, Shanghai Jiao Tong Univ. (China), 3. Ningbo Inst. of Materials Tech. and Eng., Chinese Academy of Sci. (China), 4. Faculty of Electrical Eng. and Computer Sci., Ningbo Univ. (China))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 09:15 〜 09:30 |PDF ダウンロード

[H-5-04] Laminate-Thickness-Dependent Switching Dynamics of HfO 2-ZrO 2 Ferroelectric Nanolaminate Capacitors

Xiaoyu Ke1,2, Junshuai Chai1,2, Hao Xu1,2, Xiaolei Wang1,2, Wenwu Wang1,2 (1. Key Lab. of Microelectronics Devices and Integrated Tech., Inst. of Microelectronics, Chinese Academy of Sci. (China), 2. College of Integrated Circuits, Univ. of Chinese Academy of Sci. (China))

2023 International Conference on Solid State Devices and Materials |2023年9月8日(金) 09:45 〜 10:00 |PDF ダウンロード

633件中(191 - 200)