[D-1-4] Novel Soft Error Hardened Latches and Flip-Flops

Taiki Uemura、Ryo Tanabe、Yoshiharu Tosaka、Shigeo Satoh (1.Fujitsu Laboratories Ltd.)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-1] Fabrication of 3-dimensional structure by nanoimprint process

Yoshihiko Hirai (1.Physics and Electronics Engineering, Osaka Prefecture University)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-2] Large Displacement Micro XY-Stage with Paired Moving Plates

Minoru Sasaki、Fuminori Bono、Kazuhiro Hane (1.Toyota Technological Institute, Dept. of Advanced Science and Technology、2.Tohoku University, Dept. of Nanomechanics)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-3] RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration

Kei Kuwabara、Norio Sato、Hiroki Morimura、Junichi Kodate、Toshikazu Kamei、Katsuyuki Machida、Hiromu Ishii (1.NTT Microsystem Integration Laboratories, NTT Corporation、2.NTT Advanced Technology Corporation)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-4] Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror

Minoru Sasaki、Shinya Yuki、Kazuhiro Hane (1.Toyota Technological Institute, Dept. of Advanced Science and Technology、2.Tohoku University, Dept. of Nanomechanics)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-5] Ferrite and copper electroless plating to photopolymerized resin for micro molding of three-dimensional structures

Shinya Kitayama、Toshiya Yoshimura、Shoji Maruo、Kohki Mukai (1.Department of Mechanical Engineering and Materials Science, Yokohama National University)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-6] Durability of Quartz Mold and Failure Mode Analysis in Imprint Lithography

Hideaki OOE、Tetsuya KANAGAWA、Toshio HAGI、Yukio YOSHINO (1.Murata Manufacturing Co., LTD)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-7] Dual-FFPI Temperature Sensor with a Low-Cost LED Light Source

Mu-Chun Wang、Yuan-Tai Tseng、Fan-Gang Tseng、Jon-En Wang、Henry F. Taylor (1.Dept. of Electronic Engineering, Ming-Hsin University of Science and Technology、2.Institute of Microelectromechanical System, National Tsing Hua University、3.Dept. of Electrical Engineering)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-3-1] A 0.49-6.50 Ghz Wideband LC-VCO with high-IRR in a 180nm CMOS Technology

Yuka Kobayashi、Kazuma Ohashi、Yusaku Ito、Hiroyuki Ito、Kenichi Okada、Kazuya Masu (1.Integrated Research Institute、2.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-3-2] Evaluation of Digital Crosstalk Noise on a Differential Input VCO

Akihiro Toya、Yoshitaka Murasaka、Takafumi Ohmoto、Atsushi Iwata (1.Hiroshima University、2.A-R-Tec Corp.)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード