The Japan Society of Applied Physics

375 results (1 - 10)

[S-I-1-2] In-Situ Observation of Oxygen Exposed Hydrogen Terminated Silicon Surfaces

Hiroki OGAWA, Kenji ISHIKAWA, Masaru AOKI, Shuzo FUJIMURA, Nobuo UENO, Yasuhiro HORIIKE, Yoshiya HARADA (1.Process Development Div., C850, Fujitsu Ltd., 2.Department of Chemistry, College of Arts and Science, The Univ. of Tokyo, 3.Department of Material Science, Faculty of Engineering, Chiba Univ., 4.Department of Electrical Engineering, Toyo Univ.)

1995 International Conference on Solid State Devices and Materials |PDF Download

[S-I-1-4] Interface States at Ultrathin Chemical Oxide/Silicon Interfaces Obtained from Measurements of XPS Spectra under Biases

Hikaru Kobayashi, Yoshiyuki Yamashita, Kenji Namba, Yoshihiro Nakato, Yasushiro Nishioka (1.Department of Chemistry, Faculty of Engineering Science, and Research Center for Photoenergetics of Organic Materials, Osaka University, 2.Tsukuba Research and Development Center, Texas Instruments Japan)

1995 International Conference on Solid State Devices and Materials |PDF Download

375 results (1 - 10)