The Japan Society of Applied Physics

587 results (101 - 110)

[C-8-3] Development of Multi-Scale Electromigration Simulator using Ultra Accelerated Quantum Chemical Molecular Dynamics and a Kinetic Monte Carlo Method and its Application to Cu Interconnect

H. Tsuboi1, A. Chutia1, C. Lv1, Z. Zhu1, R. Miura1, A. Suzuki1, R. Sahnoun1, M. Koyama1, N. Hatakeyama1, A. Endou1, H. Takaba1, C. A. Del Carpio1, R. C. Deka2, M. Kubo1, A. Miyamoto1 (1.Tohoku Univ., Japan, 2.Tezpur Univ., India)

2008 International Conference on Solid State Devices and Materials |PDF Download

587 results (101 - 110)