[S-IV-8] In Situ Study of Electromigration in Submicron-Wide Layered Al-0.5%Cu Lines by Side-View TEM Observation

Hidekazu OKABAYASHI, Masao KOMATSU, Hirotaro MORI (1.Research and Development Group, NEC Corp., 2.Research Center for Ultra-High Voltage Electron Microscopy, Osaka University)

1995 International Conference on Solid State Devices and Materials |PDF Download

[S-IV-9] Copper Interconnects Fabricated by Dry Etching Process

Yasushi Igarashi, Tomomi Yamanobe, Toshio Ito (1.Semiconductor Technology Laboratory, OKI Electric Industry Co., Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF Download

[S-IV-10] Double-Level Cu Inlaid Interconnects with Simultaneously Filled Via-Plugs

G. Minamihaba, Y. Shimooka, H. Tamura, T. Iijima, T. Kawanoue, H. Hirabayashi, N. Sakurai, H. Ookawa, T. Obara, H. Egawa, T. Idaka, T. Kubota, T. Shimizu, M. Koyama, G. Ooshima, K. Suguro (1.ULSI Research Laboratories, Manufacturing Engineering Research Center, Semiconductor Division, TOSHIBA Corporation)

1995 International Conference on Solid State Devices and Materials |PDF Download

[D-1-1] Terahertz Quantum Transport in Semiconductor Superlattices and Quantum Wells

S. J. ALLEN, U. BHATTACHARYA, K. L. CAMPMAN, J. GALAN, A. C. GOSSARD, J. P. KAMINSKI, B. J. KEAY, K. D. MARANOWSKI, M. J. M. RODWELL, S. ZEUNER (1.Center for Free-electron Laser Studies, 2.Materials Department, 3.Department of Electrical and Computer Engineering, 4.Physics Department, Ohio State University)

1995 International Conference on Solid State Devices and Materials |PDF Download

[D-1-2] Nanometer-Scale Current-Voltage Spectra Measurement of Resonant Tunneling Diodes Using Scanning Force Microscopy

Masafumi TANIMOTO, Kiyoshi KANISAWA, Masanori SHINOHARA (1.NTT LSI Laboratories, 2.NTT Basic Research Laboratories)

1995 International Conference on Solid State Devices and Materials |PDF Download

[D-1-3] Deep Levels and Conduction Mechanism in Low-Temperature GaAs Grown by Molecular Beam Epitaxy

S. Shiobara, T. Hashizume, H. Hasegawa (1.Research Center for Interface Quantum Electronics and Department of Electrical Engineering, Hokkaido University)

1995 International Conference on Solid State Devices and Materials |PDF Download

[D-1-4] The Electrical Properties of High Quality Stacked CdTe/Photo-Enhanced-Native-Oxide for HgCdTe Passivation

Y. K. Su, C. T. Lin, H. T. Huang, S. J. Chang, T. P. Sun, G. S. Chen, J. J. Luo (1.Department of electrical Engineering, National Cheng Kung University, 2.Chung Shan Institute of Science and Technology)

1995 International Conference on Solid State Devices and Materials |PDF Download

[D-1-5] Efficient MIS Electric Field Effect on Diamond Thin Film Transistors

Yuzuru OTSUKA, Sei SUZUKI, Tetsuro MAKI, Ken SAKUTA, Takeshi KOBAYASHI (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

1995 International Conference on Solid State Devices and Materials |PDF Download

[D-1-6] Fabrication and Characterization of a Phase Controlled SNS Quantum Electron Interferometer

V. T. Petrashov, V. N. Antonov, P. Delsing, T. Claeson (1.Institute of Microelectronics Technology, Russian Academy of Sciences, 2.Department of Physics, Chalmers University of Technology and University of Goteborg)

1995 International Conference on Solid State Devices and Materials |PDF Download

[D-2-1] Nearinfrared Intersubband Transitions in InGaAs/AlAs Quantum Wells on GaAs Substrate

Takashi ASANO, Susumu NODA, Tomoki ABE, Akio SASAKI (1.Department of Electronic Science and Engineering, Kyoto University)

1995 International Conference on Solid State Devices and Materials |PDF Download