The Japan Society of Applied Physics

[O-5-4] Optimization of CoFeB Capping Layer Thickness for Characterization of Leakage Spot in MgO Tunneling Barrier of Magnetic Tunnel Junction

S. Sato1,6, H. Honjo1,6, S. Ikeda1,2,3,6, H. Ohno1,2,3,4, T. Endoh1,2,5,6, M. Niwa1,6 (1.CIES, Tohoku Univ., 2.CSIS, Tohoku Univ., 3.RIEC, Tohoku Univ., 4.WPI-AIMR, Tohoku Univ., 5.Gradaute School of Eng., Tohoku Univ., 6.JST-ACCEL(Japan))

2015 International Conference on Solid State Devices and Materials |Tue. Sep 29, 2015 6:35 PM - 6:55 PM |PDF Download

[O-6-4] A New High Density FinFET OTP Technology

P. C. Peng1, Y. Z. Chen1, H. W. Pan1, W. Y. Hsiao2, K. H. Chen2, Y. H. Kuo2, C. P. Lin2, B. Z. Tien2, T. S. Chang2, Y. C. King1, C. J. Lin1 (1.National Tsing Hua Univ., 2.TSMC(Taiwan))

2015 International Conference on Solid State Devices and Materials |Wed. Sep 30, 2015 10:10 AM - 10:30 AM |PDF Download