[D-7-2] Performance Estimation and Benchmarking for Carbon Nanotube FETs and Nanodiode Arrays

H.-S. Philip Wong、Gary S. Ditlow、Paul M. Solomon、Xinlin Wang (1.IBM Research, T.J. Watson Research Center、2.IBM Microelectronics, SRDC)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-7-3] Ultra -low Energy Nitrogen -ion Irradiation for Improvement of Carbon Nanotube Channel Single Electron Transistor

T. Kamimura、K. Yamamoto、K. Matsumoto (1.National Institute of Advanced Industrial Science and Technology、2.Univ. of Tsukuba、3.Osaka Univ.、4.CREST/JST)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-8-1] Thermal Instability of Poly-Si Gate Al2O3 MOSFETs

W.S. Kim、T. Kawahara、H. Itoh、H. Horiuchi、A. Muto、T. Maeda、R. Mitsuhashi、K. Torii、H. Kitajima (1.Semiconductor Leading Edge Technologies, Inc.)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-8-2] W/HfO2 gate stacks with Tinv～1.2nm and low charge trapping

A. Callegari、P. Jamison、B.H. Lee、D. Neumayer、V. Narayanan、S. Zafar、E. Gousev、C. D'Emic、D. Lacey、M. Gribelyuk、C. Cabral、A. Steegen、V. Ku、R. Amos、Y. Li、P. Nguyen、F. Mc. Feely、G. Singco、J. Cai、S-H Ku、Y.Y. Wang、C. Wajda、D. O'Meara、H. Shinriki、T. Takahashi (1.IBM Semiconductor Research and Development Center (SRDC)、2.IBM T. J. Watson Research Center、3.Tokyo Electron America (TEL))

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-8-3L] Characterization of Hafnium Diffusion into Thermally-Grown SiO2 on Si(100)

Masanori Yamaoka、Akio Ohta、Seiichi Miyazaki (1.Graduate School of Advanced Sciences of Matter, Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-8-4L] Nanoscale Profiling of Surface Potential Across Silicon p-n Junctions by Scanning Resonance Tunneling Spectroscopy

Leonid Bolotov、Toshiko Okui、Hiroshi Itoh、Toshihiko Kanayama (1.MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-8-5L] Advanced SiGe-free Strained Si on Insulator Substrates: Thermal Stability and Carrier Mobility Enhancement

T. A. Langdo、M. Erdtmann、C. W. Leitz、M. T. Currie、A. Lochtefeld、Z. Cheng、J. A. Carlin、V. K. Yang、C. J. Vineis、C. Major、G. Braithwaite、H. Badawi、M. T. Bulsara (1.AmberWave Systems Corporation)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-9-1] Separate and Independent Control of Interfacial Band Alignments and Dielectric Constants in Transition Metal-Rare Earth Ternary Oxides

G. Lucovsky、Yu Zhang、J.L. Whitten、D.G. Scholm、J.L. Freeouf (1.Dept. of Physics, North Carolina State University、2.Dept. of Chemistry, North Carolina State University、3.Dept. of Materials Science and Engineering, Pennsylvania State University、4.Dept. of Electrical and Computer Engineering, Oregon Graduate Institute)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-9-2] Chemical Structures of HfO2/Si Interfacial Transition Layer

H. Nohira、Y. Takata、K. Kobayashi、M. B. Seman、S. Joumori、K. Nakajima、M. Suzuki、K. Kimura、Y. Sugita、O. Nakatsuka、A. Sakai、S. Zaima、T. Ishikawa、S. Shin、T. Hattori (1.Musashi Institute of Technology、2.RIKEN/SPring-8、3.JASRI/SPring-8、4.Graduate School of Engineering, Kyoto University、5.Fujitsu Ltd., Akiruno Technology Center、6.Graduate School of Engineering, Nagoya University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-9-3] Pulsed-source MOCVD HfO2 ultrathin film growth optimized by in situ ellipsometry monitoring

Yoshishige Tsuchiya、Masato Endoh、Shunri Oda (1.Tokyo Institute of Technology, Research Center for Quantum Effect Electronics)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード