Pt Capacitor

Sejun Oh, In Seun Park, Byueng Hee Kim, Sang Min Lee, Jong Moon, Sang In Lee, Moon Yong Lee (1.Process Development 2 Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd)

1996 International Conference on Solid State Devices and Materials |PDF Download

[PC-8-5] Orientation Control of Sr0.7Bi2.3Ta2O9 Thin Films by Chemical Process

Ichiro Koiwa, Takao Kanehara, Juro Mita, Toshiyuki Iwabuchi, Tetsuya Osaka, Sachiko Ono (1.Microsystem Technology Laboratory, Oki Electric Industry Co., Ltd., 2.Faculty of Science and Engineering, Waseda University)

1996 International Conference on Solid State Devices and Materials |PDF Download

[PC-8-6] Structural and Electrical Properties for Fluorine-Doped Silicon Oxide Films Prepared by Biased Helicon-Plasma CVD

Takahiro TAMURA, Youichi INOUE, Makoto SATOH, Hikaru YOSHITAKA, Junro SAKAI (1.Semiconductor Equipment Division, Anelva Corporation)

1996 International Conference on Solid State Devices and Materials |PDF Download

[PC-8-7] Application of SiOF Film Deposited Using TEOS/TEFS/O2 System to Multi-Level Interconnection Designed with 0.25μm Rule

Hiroshi KUDO, Yukihiro SATHO, Hisashi MIYAZAWA, Hideki HARADA, Atsuo SHIMIZU (1.Thin Film Technology Department and Process Integration Department, Process Development Division, Fujitsu Limited)

1996 International Conference on Solid State Devices and Materials |PDF Download

[D-4-1] Silicon Micromachined Microphotonics

K. Y. Lau, O. Solgaard, N. Tien, M. Daneman, M. Kiang, R. S. Muller (1.Department of EECS, University of California at Berkeley)

1996 International Conference on Solid State Devices and Materials |PDF Download

[D-4-2] High Responsivity in Optically Controlled Field-Effect Transistor Using Direct Wafer Bonding Technique

Takayuki SAKAI, Kazuhiko SHIMOMURA (1.Department of Electrical and Electronics Engineering, Sophia University)

1996 International Conference on Solid State Devices and Materials |PDF Download

[D-4-3] High-Rate GaAs Epitaxial Lift-Off Technique for Optoelectronic Integrated Circuits

J. Maeda, Y. Sasaki, K. Shibahara, S. Yokoyama, S. Miyazaki, M. Hirose (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.Faculty of Engineering, Hiroshima University)

1996 International Conference on Solid State Devices and Materials |PDF Download

[D-4-4] Polyimide Optical Waveguide with Multi-Fan-Out for Multi-Chip Module Application

Yutaka NOGUCHI, Takuji MATSUMOTO, Yoshiharu KUDOH, Mitsumasa KOYANAGI (1.Dept. of Machine Intelligence and System Engineering, Intelligent System Design Laboratory, Tohoku University)

1996 International Conference on Solid State Devices and Materials |PDF Download

[D-5-1] Strained Double-Quantum-Well Lasers Emitting in 1.2 μm Region Grown on In0.21Ga0.79As Ternary Substrates

K. Otsubo, H. Shoji, T. Kusunoki, T. Suzuki, T. Uchida, H. Ishikawa (1.Fujitsu Laboratories Ltd.)

1996 International Conference on Solid State Devices and Materials |PDF Download

[D-5-2] Extremely Low Astigmatism and Aspect Ratio in 650nm-Band Self-Pulsing AlGaInP Lasers with Strained-Quantum-Well Saturable-Absorbing Layer

Hideto ADACHI, Isao KIDOGUCHI, Toshiya FUKUHISA, Kiyotake TANAKA, Masaya MANNOH, Akira TAKAMORI (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

1996 International Conference on Solid State Devices and Materials |PDF Download