The Japan Society of Applied Physics

298 results (141 - 150)

[PD-4-5] A Novel Shallow Trench Isolation Technique

Juing-Yi Cheng, Tan Fu Lei, Tien Sheng Chao (1.Department of Electronics Engineering and Institute of Electronics National Chiao Tung University and, 2.National Nano Device Laboratory)

1996 International Conference on Solid State Devices and Materials |PDF Download

[PD-4-7] Effects of Thermal Stability of Si1-x-yGexCy Layers on Properties of Their Contacts with Aluminum

Jian MI, Ashawant GUPTA, Cary Y. YANG, Jintian ZHU, Paul K. L. YU, Patricia WARREN, Michel DUTOIT (1.Microelectronics Laboratory, Santa Clara University, 2.Department of Electrical and Computer Engineering, University of California, 3.Institute for Micro- and Optoelectronics, Department of Physics Swiss Federal Institute of Technology)

1996 International Conference on Solid State Devices and Materials |PDF Download

298 results (141 - 150)