[P3-22] Fabrication and electrical properties of buried tungsten structure for direct three dimensional integration

Hong Seung Kim, Lei Xue, Arvind Kumar, Sandip Tiwari (1.School of Electrical Engineering and Computer Engineering, Cornell University, 2.Ultra-high speed communication IC team, ETRI)

2002 International Conference on Solid State Devices and Materials |PDF Download

[P3-23] Direct Patterning of Low-k Dielectric Films using X-Ray Lithography

S. Kuroki, T. Kikkawa, H. Kochiya, S. Shishiguchi (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.Association of Super-Advanced Electron Technology)

2002 International Conference on Solid State Devices and Materials |PDF Download

[LP3-1] Interaction of Cu with low-k plasma polymer films deposited by PECVD using decahydronaphthalene and tetraethylorthosilicate precursors

Cheonman Shim, Jaeyoung Yang, Seungman Jung, Munkyu Choi, Donggeun Jung (1.Department of Physics, Brain Korea 21 Physics Research Division, Institute of Basic Science, and Center for Nanotubes and Nanostructured Composites, Sungkyunkwan University)

2002 International Conference on Solid State Devices and Materials |PDF Download

[LP3-2] Sub-10 nm depth ultra low resistance pn junction with antimony implantation

Hiroshi Nakao, Kenichi Okabe, Tomohiro Kubo, Youichi Momiyama, Masataka Kase (1.Fujitsu Laboratories LTD., 2.Fujitsu VLSI Process Technology Lab. LTD., 3.Fujitsu LTD. Fujitsu Akiruno Technology Center)

2002 International Conference on Solid State Devices and Materials |PDF Download

[P4-1] Local Leakage Current of HfO2 Thin Films Characterized by Conducting Atomic Force Microscopy

Hiroya Ikeda, Tomokazu Goto, Mitsuo Sakashita, Akira Sakai, Shigeaki Zaima, Yukio Yasuda (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, 2.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

2002 International Conference on Solid State Devices and Materials |PDF Download

[P4-2] Investigation of (HfO2)x(Al2O3)1-x on (100) Si by XPS--energy gap and band alignment

H. Y. Yu, M. F. Li, D. L. Kwong, B. J. Cho, J. S. Pan, C. H. Ang, J. Z. Zheng (1.Silicon Nano Device Lab, ECE Department, National University of Singapore, 2.Dept. Electrical and Computer Engineering, University of Texas at Austin, 3.Institute of Materials Research & Engineering, 4.Chartered Semiconductor Manufacturing Ltd.)

2002 International Conference on Solid State Devices and Materials |PDF Download

[P4-3] Atomic layer-by-layer MOCVD of high-k dielectric thin films with in-situ monitoring by spectroscopic ellipsometry

Yoshishige Tsuchiya, Masato Endoh, Masatoshi Kurosawa, Raymond T. Tung, Takeo Hattori, Shunri Oda (1.Tokyo Institute of Technology, Research Center for Quantum Effect Electronics, 2.Musashi Institute of Technology, Department of Electrical and Electronic Engineering)

2002 International Conference on Solid State Devices and Materials |PDF Download

[P4-4] Structural and Electrical Properties of HfO2-TiO2 Composite Films Formed by Pulsed Laser Deposition

Kazutaka Honda, Satoru Goto, Mitsuo Sakashita, Hiroya Ikeda, Akira Sakai, Shigeaki Zaima, Yukio Yasuda (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, 2.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

2002 International Conference on Solid State Devices and Materials |PDF Download

[P4-5] Thermal Stability of HfO2/Ultrathin-SiO2/Si Structures

Noriyuki Miyata, Masakazu Ichikawa, Toshihide Nabatame, Akira Toriumi (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 2.The University of Tokyo, 3.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET))

2002 International Conference on Solid State Devices and Materials |PDF Download

[P4-6] Fractal Analysis of Surface Morphology of Nano-structured BST Thin Films

Kyung-Jin Hong, Yong-Ki Min, Wan-Kyoo Choi, Jae-Cheol Cho (1.Division of Computer, Electronics & Communications Engineering, 2.Dept. Of Electronics Engineering)

2002 International Conference on Solid State Devices and Materials |PDF Download