[P-1-8] Investigation of Inversion C-V Reconstruction for Long-Channel MOSFETs with Leaky Dielectrics using Intrinsic Input Resistance Approach

Wei Lee、Pin Su、Ke-Wei Su、Chung-Shi Chiang、Sally Liu (1.Department of Electronics Engineering, National Chiao Tung University、2.Taiwan Semiconductor Manufacturing Company)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-9] Behavior of Local Charge Trapping Sites in La2O3-Al2O3 Composite Films under Constant Voltage Stress

Toshifumi Sago、Akiyoshi Seko、Mitsuo Sakashita、Akira Sakai、Masaki Ogawa、Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University、2.Center for Cooperative Research in Advanced Science & Technology, Nagoya University)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-10] Improvement of mobility and NBTI reliability in MOSFETs with ALD-Si-nitride/SiO2 stack dielectrics and p+-poly-Si gate

Shiyang Zhu、Anri Nakajima、Takuo Ohashi、Hideharu Miyake (1.Research Center for Nanodevices and Systems, Hiroshima University、2.Elpida Memory, Inc.)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-11] Near Surface Oxide Trap Density Profiling in NO and Remote Plasma Nitrided Oxides in Nano-Scale MOSFETs, Using Multi-Temperature Charge Pumping Technique: Not vs. Oxide Processing

Younghwan Son、Chang-Ki Baek、Bomsoo Kim、In-Shik Han、Tae-Gyu Goo、Hi-Deok Leeand、Dae M. Kim (1.Department of Electronics Engineering, Chungnam National University、2.Korea Institute for Advanced Study)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-12] Ultra-thin Oxide Lifetime Projection and Comparison of nFET and pFET for 90nm/65nm Application

Cheng-Li Lin、Tom Kao、Ju-Ping Chen、Jerry Shieh、K. C. Su (1.Q&RA Division, United Microelectronics Corporation (UMC))

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-13] Theoretical Simulation of Dielectric Breakdown by Molecular Dynamics and Tight-Binding Quantum Chemistry Methods

Zhigang Zhu、Arunabhiram Chutia、Hideyuki Tsuboi、Michihisa Koyama、Akira Endou、Hiromitsu Takaba、Momoji Kubo、Carlos A. Del Carpio、Parasuraman Selvam、Akira Miyamoto (1.Department of Applied Chemistry, Graduate School of Engineering, Tohoku University、2.PRESTO, Japan Science and Technology Agency、3.New Industry Creation Hatchery Center, Tohoku University)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-14] Electrical characteristic improvement of high-k gated MOS device by nitridation treatment using plasma immersion ion implantation (PIII)

Kuei-Shu Chang-Liao、Ping-Hung Tsai、H. Y. Kao、T. K. Wang、S. F. Huang、W. F. Tsai、C. F. Ai (1.Department of Engineering and System Science, National Tsing Hua University、2.Physics Division, Institution of Nuclear Energy Research)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-15] Effect of Gate Oxide Thickness Uniformity on the Characteristics of Three-dimensional Transistors

Heung-Jae Cho、Tae-Yoon Kim、Yong Soo Kim、Se-Aug Jang、Seung Ryong Lee、Kwan-Yong Lim、Min Gyu Sung、Jong-Hyeop Kim、Sang-Won Oh、Tae-Woo Jung、Tae-Kyung Oh、Yun-Taek Hwang、Young-Hoon Kim、Hong-Seon Yang、Jin-Woong Kim (1.R&D Division, Hynix Semiconductor Inc., Ichon P.O.)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-16] Precise Extraction of Metal Gate Work Function from Bevel Structures

Atsushi Kuriyama、Olivier Faynot、Laurent Brevard、Amelie Tozzo、Laurence Clerc、Jerome Mitard、Vincent Vidal、Simon Deleonibus、Sorin Cristoloveanu、Hiroshi Iwai (1.CEA-LETI, CEA Grenoble、2.STMicroelectronics、3.IMEP (UMR CNRS-INPG-UJF), ENSERG、4.Tokyo Institute of Technology, Frontier Collaborative Research Center)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-1-17] Work Function Modulation Using Thin Interdiffused Metal Layers for Dual Metal-Gate Technology

Andy Eu-Jin Lim、Wan-Sik Hwang、Xin-Peng Wang、Dim-Lee Kwong、Yee-Chia Yeo (1.Dept. of Electrical & Computer Engineering, National University of Singapore、2.Institute of Microelectronics)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード