[P-11-2] Discharge Current Controlled Atmospheric Microplasma Generation

H. Park¹, J. Kim¹, Y. Kim¹ (1.Hongik Univ.)

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-3] Continuous Manipulation of Micro Particles by Use of Asymmetric Electrodes Array

M. Midorikawa¹, S. Kuroki¹, D. Obara¹, K. Kotani¹, T. Ito¹ (1.Tohoku Univ.)

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-4] Actuation of Magnetic Beads on a CMOS Chip for Biological Applications

T. Ishikawa¹, K. Johguchi¹, F. Kaneko¹ (1.Hiroshima Univ.)

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-5] A Novel Differential LAPS with PVC and HfO₂ Sensing Membranes for pH Sensors

C. S. Lai¹, C. M. Wu¹, C. E. Lue¹, T. F. Lu¹, C. M. Yang², H. Y. Chen¹ (1.Chang Gung Univ.(Taiwan), 2.Inoteramemories Inc.(Taiwan))

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-6] Ultra-Conformal Metal Coating on High-aspect-ratio 3D Structures using Supercritical Fluid: Controlled Selectivity/Non-Selectivity

T. Momose^1,2, T. Uejima¹, H. Yamada², M. Sugiyama^1,2, Y. Shimogaki^1,2 (1.Univ. of Tokyo(Japan), 2.BEANS Project, METI(Japan))

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-7] Fabrication of Electrostatic Actuated Rotary for Micro Interferometer

Y. M. Lee¹, M. Toda¹, T. Ono¹, M. Esashi¹ (1.Tohoku Univ.)

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-8] Thermopile IR Detector Integrated with Wavelength Selective Filter Stable against Temperature and Incident Angle Change

K. Masuno¹, S. Kumagai¹, M. Sasaki¹, K. Tashiro¹ (1.Toyota Technological Inst.)

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-9] Silane-coupling Silicon Substrate that Fixes Protein without Adsorption of Protein Buffer Components for Device Fabrication

M. Fukuta¹, I. Yamashita^1,2 (1.NAIST(Japan), 2.Panasonic Corp.(Japan))

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-10] Multi-channel Bio Sensing and Stimulation LSI Chip using 0.18 µm CMOS Process

M. Yamaguchi¹, A. Shimada², K. Torimitsu², N. Nakano¹ (1.Keio Univ.(Japan), 2.NTT Corp.(Japan))

2009 International Conference on Solid State Devices and Materials |PDF Download

[P-11-11] Fabrication of Smart Electrochemical Sensor with CMOS Integrated Circuits

T. Yamazaki^1,2, T. Ikeda¹, Y. Kano¹, H. Takao^1,3, M. Ishida^1,3, K. Sawada^1,3 (1.Toyohashi Univ. of Tech.(Japan), 2.HIOKI E. E. Corp.(Japan), 3.CREST-JST(Japan))

2009 International Conference on Solid State Devices and Materials |PDF Download