[P-2-4] Low-Temperature (~300°C) Epitaxial-Growth of SiGe(Sn) on Si-Platform by Liquid-Solid Coexisting Annealing

H. Chikita¹、R. Matsumura¹、Y. Tojo¹、Y. Kinoshita¹、T. Sadoh¹、M. Miyao¹ (1.Kyushu Univ. (Japan))

2013 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-2-5] Structural Characterization of Polycrystalline Ge Thin Films on Insulators Formed by Diffusion-enhanced Al-induced Layer Exchange

R. Numata¹、K. Toko¹、N. Oya¹、N. Usami²、T. Suemasu¹ (1.Inst. of Appl. Phys., Univ. of Tsukuba、2.Mater., Phys. and Energy Eng., Nagoya Univ. (Japan))

2013 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-2-6] Al-induced Crystallization of Amorphous-Ge Thin Films on Conducting Layer Coated Glass Substrates

K. Nakazawa¹、K. Toko¹、N. Usami²、T. Suemasu¹ (1.Tsukuba Univ.、2.Nagoya Univ. (Japan))

2013 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-3-1] Ultrasonic-Assisted Mist Deposition for Green Materials and Devices

S. Fujita¹、K. Kaneko²、S. Katori³、T. Kawaharamura⁴、M. Furuta⁴ (1.Kyoto Univ.、2.Kyoto Univ.、3.Tsuyama National College of Tech.、4.Kochi Univ. Tech. (Japan))

2013 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-3-2] Fabrication of Aluminum Oxide Thin Films by Solution-Source Non-Vacuum Process of Mist Chemical Vapor Deposition with Ozone Assistance

T. Uchida¹、T. Kawaharamura²、M. Furuta²、S. Fujita³ (1.Kyoto Univ. Department of Electronic Sci. and Eng.、2.Kochi Univ. of Tech. Inst. for Nanotechnorogy、3.Kyoto Univ. Photonics and Electronics Sci. and Eng. Center (Japan))

2013 International Conference on Solid State Devices and Materials |PDF ダウンロード