The 80th JSAP Autumn Meeting 2019

Sessions

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[18p-E304-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 18, 2019 1:45 PM - 4:15 PM E304 (E304)

Hiroshi Ikenoue(Kyushu Univ.), Hitoshi Habuka(Yokohama Natl. Univ.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Reo Kometani(Univ. of Tokyo), Fukushima Takafumi(Tohoku University)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[19p-E304-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Kuniyuki Kakushima(Tokyo Tech), Hitoshi Habuka(Yokohama Natl. Univ.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Poster presentation

[20p-PA7-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 20, 2019 4:00 PM - 6:00 PM PA7 (PA)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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