[P-3-22] Calibration of Linear Piezo Resistance Coefficients using 3-Dimensional Stress Simulation of Si-MOSFETs Structures

A. Satoh¹、T. Tada¹、V. Poborchii¹、T. Kanayama¹、S. Satoh²、H. Arimoto¹ (1.AIST、2.Fujitsu Semiconductor Ltd. , Japan)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P-3-23] Investigation of Different Capping Layers and Strain Sources for SMT Process

C. C. Liao¹、M. C. Lin¹、T. S. Chao¹ (1.National Chiao Tung Univ. , Taiwan)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

J. Tan¹、B. Buttgen¹、A. J. P. Theuwissen^1,2 (1.Delft Univ. of Tech. , Netherlands、2.Harvest Imaging , Belgium)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

Y. H. Lue¹、C. H. Chien¹、P. Y. Kuo¹、M. J. Yang¹、H. Y. Lin²、T. S. Chao¹ (1.National Chiao Tung Univ.、2.Toppoly Optoelectronics Corp. , Taiwan)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

D. D. Zhao¹、C. H. Lee¹、T. Nishimura^1,2、K. Nagashio^1,2、K. Kita^1,2、A. Toriumi^1,2 (1.Univ. of Tokyo、2.JST-CREST , Japan)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

Y. Li^1,2、C. H. Yu¹、M. H. Han¹、H. W. Cheng¹ (1.National Chiao Tung Univ.、2.National Nano Device Labs. , Taiwan)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

T. Fukushima¹、K. Maeda¹、T. Yoshimura¹、A. Ashida¹、N. Fujimura¹ (1.Osaka Prefecture Univ. , Japan)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

J. Shin¹、I. Kim¹、J. Park¹、J. Lee¹、M. Jo¹、K. P. Biju¹、S. Jung¹、W. Lee¹、S. Kim¹、S. Park¹、D. Lee¹、H. Hwang¹ (1.Gwangju Inst. of Sci. and Tech. , Korea)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

C. W. Kuo¹、J. J. Huang¹、W. C. Chang¹、T. H. Hou¹ (1.National Chiao Tung Univ. , Taiwan)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

I. Kim¹、S. Jung¹、J. Shin¹、K. P. Biju¹、K. Seo¹、M. Siddik¹、X. J. Liu¹、J. Kong¹、K. Lee¹、H. Hwang¹ (1.Gwangju Inst. of Sci. and Tech. , Korea)

2010 International Conference on Solid State Devices and Materials |PDF ダウンロード

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