Oral presentation
[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)
Kuniyuki Kakushima(Tokyo Tech)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Yongxun Liu1, Ippei Akita1, Takashi Matsukawa1, Hiroyuki Tanaka1,2, Kazuhiro Koga2, Kazumasa Nemoto1, Sommawan Khumpuang1,2, Masayoshi Nagao1, Yukinori Morita1, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
9:15 AM - 9:30 AM
Mana Otani1, 〇Hitoshi Habuka1, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)
9:30 AM - 9:45 AM
〇Fumito Imura1,2, Michihiro Inoue1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
9:45 AM - 10:00 AM
〇kazushige sato1,4, Shunji Takahashi3, Shoji Den3, Sommawan Khumpuang1,2, Hara Shiro1,2 (1.MINIMAL, 2.AIST, 3.KATAGIRI ENGINEERING, 4.Sakaguchi E.H VOC Corp.)
10:00 AM - 10:15 AM
〇Hiroyuki Tanaka1,2, Hisato Ogiso1,2, Shizuka Nakano1,2, Yoshiyuki Nozawa2,3, Toshihiro Hayami2,3, Khumpuang Sommawan1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPPT)
10:15 AM - 10:30 AM
〇Kazuhiro Koga1, Masashi Kase2, Kazushige Sato1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MIN IMAL, 2.AIST)
10:45 AM - 11:00 AM
〇Kazumasa Nemoto1, Takashi Yajima1, Hiroyuki Tanaka1, Shuichi Noda1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
11:00 AM - 11:15 AM
〇Satoshi Fujii1, Haruki Toonoe2, Yasunori Shiba2, Manelli Dario3, Motoi Tokuda3, Takashi Ooe3, Koji Kosaka3, Shiro Hara4 (1.NIT, Okinawa Coll., 2.Yokogawa S.S., 3.TCK, 4.AIST)
11:15 AM - 11:30 AM
〇Shuichi Noda1, Kazuhiro Koga2, Fumito Imura1, Kazumasa Nemoto1, Yuuki Yabuta3, Yamamoto Naoko3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-Kogyo)
11:30 AM - 11:45 AM
〇Noriko Miura1, Naoki Hashimoto1,2, Yoshitaka Kitamura1,2, Fumito Imura1,3, Kazushige Sato1, Kazuhiro Koga1, Yuuki Ishida1,3, Toshiyuki Oodaira1,3, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.MINIMAL, 2.FUJI IMVAC INC., 3.AIST)
11:45 AM - 12:00 PM
〇Takashi Yajima1,2, Sommawan Khumpuang1,2, Hitoshi Maekawa1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)