The 67th JSAP Spring Meeting 2020

Sessions

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)

Kuniyuki Kakushima(Tokyo Tech)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Hiroshi Ikenoue(Kyushu Univ.), Masato Sone(Tokyo Tech)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Akito Hara(Tohoku Gakuin Univ.), Tatsuya Okada(Univ. of the Ryukyus)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Poster presentation

[15a-PB3-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB3 (PB)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

9:30 AM - 11:30 AM

〇(B)Yuto Honda1, Sawako Tanaka1, Yong-Joon Choi1, Kazuaki Sawada1, Toshihiko Noda1, Kazuhiro Takahashi1, Hiromu Ishii1, Katsuyuki Machida2, Yasuhiko Nikaido3, Mitsumasa Saito3, Shinichi Yoshida4 (1.Toyohashi Univ. of Technology, 2.Tokyo Inst of .Technology, 3.Univ. of Occupational and Environmental Health, 4.Fukuoka Megumi Hospital)

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